JPS5260423A - High-vaccum intermediade-chamber type ultra high-vacuum gas tight seal ing apparatus - Google Patents
High-vaccum intermediade-chamber type ultra high-vacuum gas tight seal ing apparatusInfo
- Publication number
- JPS5260423A JPS5260423A JP13623675A JP13623675A JPS5260423A JP S5260423 A JPS5260423 A JP S5260423A JP 13623675 A JP13623675 A JP 13623675A JP 13623675 A JP13623675 A JP 13623675A JP S5260423 A JPS5260423 A JP S5260423A
- Authority
- JP
- Japan
- Prior art keywords
- intermediade
- vaccum
- chamber type
- tight seal
- type ultra
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Gasket Seals (AREA)
- Sealing Devices (AREA)
Abstract
PURPOSE: Provision of high-vacuum intermediate-chamber type ultra high-vacuum gastight sealing apparatus using rubber packings which is inexpensive in manufacture and easy in assembly.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13623675A JPS5260423A (en) | 1975-11-14 | 1975-11-14 | High-vaccum intermediade-chamber type ultra high-vacuum gas tight seal ing apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13623675A JPS5260423A (en) | 1975-11-14 | 1975-11-14 | High-vaccum intermediade-chamber type ultra high-vacuum gas tight seal ing apparatus |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5260423A true JPS5260423A (en) | 1977-05-18 |
Family
ID=15170455
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13623675A Pending JPS5260423A (en) | 1975-11-14 | 1975-11-14 | High-vaccum intermediade-chamber type ultra high-vacuum gas tight seal ing apparatus |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5260423A (en) |
-
1975
- 1975-11-14 JP JP13623675A patent/JPS5260423A/en active Pending
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