JPS5256077A - Process of oxidation at low temperature - Google Patents

Process of oxidation at low temperature

Info

Publication number
JPS5256077A
JPS5256077A JP13231475A JP13231475A JPS5256077A JP S5256077 A JPS5256077 A JP S5256077A JP 13231475 A JP13231475 A JP 13231475A JP 13231475 A JP13231475 A JP 13231475A JP S5256077 A JPS5256077 A JP S5256077A
Authority
JP
Japan
Prior art keywords
low temperature
oxidation
beent
gasses
oxidizing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13231475A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5692B2 (enExample
Inventor
Masahiko Hirose
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP13231475A priority Critical patent/JPS5256077A/ja
Publication of JPS5256077A publication Critical patent/JPS5256077A/ja
Publication of JPS5692B2 publication Critical patent/JPS5692B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Cleaning In General (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
JP13231475A 1975-11-04 1975-11-04 Process of oxidation at low temperature Granted JPS5256077A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13231475A JPS5256077A (en) 1975-11-04 1975-11-04 Process of oxidation at low temperature

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13231475A JPS5256077A (en) 1975-11-04 1975-11-04 Process of oxidation at low temperature

Publications (2)

Publication Number Publication Date
JPS5256077A true JPS5256077A (en) 1977-05-09
JPS5692B2 JPS5692B2 (enExample) 1981-01-06

Family

ID=15078409

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13231475A Granted JPS5256077A (en) 1975-11-04 1975-11-04 Process of oxidation at low temperature

Country Status (1)

Country Link
JP (1) JPS5256077A (enExample)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53147631A (en) * 1977-05-30 1978-12-22 Toshiba Corp Method of reducing activated gas
JPS56121678A (en) * 1980-02-27 1981-09-24 Nippon Steel Corp Method and device for physically cleaning thin steel plate
EP0176295A3 (en) * 1984-09-17 1988-01-07 Randall Mundt Eliminating unwanted material from a gas flow line
US5472664A (en) * 1989-03-08 1995-12-05 Abtox, Inc. Plasma gas mixture for sterilizer and method

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53147631A (en) * 1977-05-30 1978-12-22 Toshiba Corp Method of reducing activated gas
JPS56121678A (en) * 1980-02-27 1981-09-24 Nippon Steel Corp Method and device for physically cleaning thin steel plate
EP0176295A3 (en) * 1984-09-17 1988-01-07 Randall Mundt Eliminating unwanted material from a gas flow line
US5472664A (en) * 1989-03-08 1995-12-05 Abtox, Inc. Plasma gas mixture for sterilizer and method

Also Published As

Publication number Publication date
JPS5692B2 (enExample) 1981-01-06

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