JPS5255376A - Apparatus for moving semiconductor substrate holding device at constan t speed within reaction tube - Google Patents
Apparatus for moving semiconductor substrate holding device at constan t speed within reaction tubeInfo
- Publication number
- JPS5255376A JPS5255376A JP13102575A JP13102575A JPS5255376A JP S5255376 A JPS5255376 A JP S5255376A JP 13102575 A JP13102575 A JP 13102575A JP 13102575 A JP13102575 A JP 13102575A JP S5255376 A JPS5255376 A JP S5255376A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor substrate
- holding device
- reaction tube
- substrate holding
- constan
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
PURPOSE: To obtain an apparatus for moving a semiconductor substrate holding device at a constant speed within a reaction tube by converting the revolving motion of a pulse motor to linear motion.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13102575A JPS5255376A (en) | 1975-10-30 | 1975-10-30 | Apparatus for moving semiconductor substrate holding device at constan t speed within reaction tube |
US05/714,806 US4075972A (en) | 1975-08-20 | 1976-08-16 | Apparatus for thermal diffusion of semiconductor devices |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13102575A JPS5255376A (en) | 1975-10-30 | 1975-10-30 | Apparatus for moving semiconductor substrate holding device at constan t speed within reaction tube |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5255376A true JPS5255376A (en) | 1977-05-06 |
Family
ID=15048237
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13102575A Pending JPS5255376A (en) | 1975-08-20 | 1975-10-30 | Apparatus for moving semiconductor substrate holding device at constan t speed within reaction tube |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5255376A (en) |
-
1975
- 1975-10-30 JP JP13102575A patent/JPS5255376A/en active Pending
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