JPS5255376A - Apparatus for moving semiconductor substrate holding device at constan t speed within reaction tube - Google Patents

Apparatus for moving semiconductor substrate holding device at constan t speed within reaction tube

Info

Publication number
JPS5255376A
JPS5255376A JP13102575A JP13102575A JPS5255376A JP S5255376 A JPS5255376 A JP S5255376A JP 13102575 A JP13102575 A JP 13102575A JP 13102575 A JP13102575 A JP 13102575A JP S5255376 A JPS5255376 A JP S5255376A
Authority
JP
Japan
Prior art keywords
semiconductor substrate
holding device
reaction tube
substrate holding
constan
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13102575A
Other languages
Japanese (ja)
Inventor
Masao Yamawaki
Katsuo Aoki
Yoshio Oka
Takao Suzuki
Osamu Ina
Kunihiko Hara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Denso Corp
Original Assignee
NipponDenso Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NipponDenso Co Ltd filed Critical NipponDenso Co Ltd
Priority to JP13102575A priority Critical patent/JPS5255376A/en
Priority to US05/714,806 priority patent/US4075972A/en
Publication of JPS5255376A publication Critical patent/JPS5255376A/en
Pending legal-status Critical Current

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  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

PURPOSE: To obtain an apparatus for moving a semiconductor substrate holding device at a constant speed within a reaction tube by converting the revolving motion of a pulse motor to linear motion.
COPYRIGHT: (C)1977,JPO&Japio
JP13102575A 1975-08-20 1975-10-30 Apparatus for moving semiconductor substrate holding device at constan t speed within reaction tube Pending JPS5255376A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP13102575A JPS5255376A (en) 1975-10-30 1975-10-30 Apparatus for moving semiconductor substrate holding device at constan t speed within reaction tube
US05/714,806 US4075972A (en) 1975-08-20 1976-08-16 Apparatus for thermal diffusion of semiconductor devices

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13102575A JPS5255376A (en) 1975-10-30 1975-10-30 Apparatus for moving semiconductor substrate holding device at constan t speed within reaction tube

Publications (1)

Publication Number Publication Date
JPS5255376A true JPS5255376A (en) 1977-05-06

Family

ID=15048237

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13102575A Pending JPS5255376A (en) 1975-08-20 1975-10-30 Apparatus for moving semiconductor substrate holding device at constan t speed within reaction tube

Country Status (1)

Country Link
JP (1) JPS5255376A (en)

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