JPS5253596A - Polishing apparatus - Google Patents

Polishing apparatus

Info

Publication number
JPS5253596A
JPS5253596A JP50129465A JP12946575A JPS5253596A JP S5253596 A JPS5253596 A JP S5253596A JP 50129465 A JP50129465 A JP 50129465A JP 12946575 A JP12946575 A JP 12946575A JP S5253596 A JPS5253596 A JP S5253596A
Authority
JP
Japan
Prior art keywords
polishing apparatus
liquid
disk
polishing
utilization
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50129465A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5728625B2 (enExample
Inventor
Shigeru Nishizawa
Toru Sato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP50129465A priority Critical patent/JPS5253596A/ja
Publication of JPS5253596A publication Critical patent/JPS5253596A/ja
Publication of JPS5728625B2 publication Critical patent/JPS5728625B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
JP50129465A 1975-10-28 1975-10-28 Polishing apparatus Granted JPS5253596A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50129465A JPS5253596A (en) 1975-10-28 1975-10-28 Polishing apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50129465A JPS5253596A (en) 1975-10-28 1975-10-28 Polishing apparatus

Publications (2)

Publication Number Publication Date
JPS5253596A true JPS5253596A (en) 1977-04-30
JPS5728625B2 JPS5728625B2 (enExample) 1982-06-17

Family

ID=15010153

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50129465A Granted JPS5253596A (en) 1975-10-28 1975-10-28 Polishing apparatus

Country Status (1)

Country Link
JP (1) JPS5253596A (enExample)

Also Published As

Publication number Publication date
JPS5728625B2 (enExample) 1982-06-17

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