JPS5252133A - Continuous film coating apparatus - Google Patents

Continuous film coating apparatus

Info

Publication number
JPS5252133A
JPS5252133A JP8499075A JP8499075A JPS5252133A JP S5252133 A JPS5252133 A JP S5252133A JP 8499075 A JP8499075 A JP 8499075A JP 8499075 A JP8499075 A JP 8499075A JP S5252133 A JPS5252133 A JP S5252133A
Authority
JP
Japan
Prior art keywords
coating apparatus
film coating
continuous film
continuous
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8499075A
Other languages
English (en)
Japanese (ja)
Other versions
JPS555587B2 (enrdf_load_stackoverflow
Inventor
Noboru Kuriyama
Yoshinori Itou
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokuda Seisakusho Co Ltd
Original Assignee
Tokuda Seisakusho Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokuda Seisakusho Co Ltd filed Critical Tokuda Seisakusho Co Ltd
Priority to JP8499075A priority Critical patent/JPS5252133A/ja
Publication of JPS5252133A publication Critical patent/JPS5252133A/ja
Publication of JPS555587B2 publication Critical patent/JPS555587B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Coating Of Shaped Articles Made Of Macromolecular Substances (AREA)
  • Physical Vapour Deposition (AREA)
JP8499075A 1975-07-11 1975-07-11 Continuous film coating apparatus Granted JPS5252133A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8499075A JPS5252133A (en) 1975-07-11 1975-07-11 Continuous film coating apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8499075A JPS5252133A (en) 1975-07-11 1975-07-11 Continuous film coating apparatus

Publications (2)

Publication Number Publication Date
JPS5252133A true JPS5252133A (en) 1977-04-26
JPS555587B2 JPS555587B2 (enrdf_load_stackoverflow) 1980-02-07

Family

ID=13846053

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8499075A Granted JPS5252133A (en) 1975-07-11 1975-07-11 Continuous film coating apparatus

Country Status (1)

Country Link
JP (1) JPS5252133A (enrdf_load_stackoverflow)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58500174A (ja) * 1981-02-12 1983-02-03 ザ・ビーオーシー・グループ・パブリック・リミテッド・カンパニー マグネトロン型陰極スパツタリング装置
JPS59162274A (ja) * 1983-03-07 1984-09-13 Anelva Corp 連続薄膜製造装置
JPS6164879A (ja) * 1984-06-28 1986-04-03 ゼネラル　モ−タ−ズ　コ−ポレ−シヨン 平面マグネトロン・スパッタリング陰極組立体
JPS61266573A (ja) * 1985-05-21 1986-11-26 Toyoda Gosei Co Ltd スパツタリング装置
JPS61266571A (ja) * 1985-05-21 1986-11-26 Toyoda Gosei Co Ltd スパツタリング装置
JPS61266572A (ja) * 1985-05-21 1986-11-26 Toyoda Gosei Co Ltd スパツタリング装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4951867U (enrdf_load_stackoverflow) * 1972-08-17 1974-05-08
US3829373A (en) * 1973-01-12 1974-08-13 Coulter Information Systems Thin film deposition apparatus using segmented target means
JPS5023382A (enrdf_load_stackoverflow) * 1973-07-05 1975-03-13

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4951867U (enrdf_load_stackoverflow) * 1972-08-17 1974-05-08
US3829373A (en) * 1973-01-12 1974-08-13 Coulter Information Systems Thin film deposition apparatus using segmented target means
JPS5023382A (enrdf_load_stackoverflow) * 1973-07-05 1975-03-13

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58500174A (ja) * 1981-02-12 1983-02-03 ザ・ビーオーシー・グループ・パブリック・リミテッド・カンパニー マグネトロン型陰極スパツタリング装置
JPS59162274A (ja) * 1983-03-07 1984-09-13 Anelva Corp 連続薄膜製造装置
JPS6164879A (ja) * 1984-06-28 1986-04-03 ゼネラル　モ−タ−ズ　コ−ポレ−シヨン 平面マグネトロン・スパッタリング陰極組立体
JPS61266573A (ja) * 1985-05-21 1986-11-26 Toyoda Gosei Co Ltd スパツタリング装置
JPS61266571A (ja) * 1985-05-21 1986-11-26 Toyoda Gosei Co Ltd スパツタリング装置
JPS61266572A (ja) * 1985-05-21 1986-11-26 Toyoda Gosei Co Ltd スパツタリング装置

Also Published As

Publication number Publication date
JPS555587B2 (enrdf_load_stackoverflow) 1980-02-07

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