JPS5248059B2 - - Google Patents
Info
- Publication number
- JPS5248059B2 JPS5248059B2 JP8754673A JP8754673A JPS5248059B2 JP S5248059 B2 JPS5248059 B2 JP S5248059B2 JP 8754673 A JP8754673 A JP 8754673A JP 8754673 A JP8754673 A JP 8754673A JP S5248059 B2 JPS5248059 B2 JP S5248059B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Led Devices (AREA)
- ing And Chemical Polishing (AREA)
- Weting (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8754673A JPS5248059B2 (en) | 1973-08-06 | 1973-08-06 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8754673A JPS5248059B2 (en) | 1973-08-06 | 1973-08-06 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5037372A JPS5037372A (en) | 1975-04-08 |
JPS5248059B2 true JPS5248059B2 (en) | 1977-12-07 |
Family
ID=13917969
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8754673A Expired JPS5248059B2 (en) | 1973-08-06 | 1973-08-06 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5248059B2 (en) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6384001B2 (en) * | 1997-03-03 | 2002-05-07 | Micron Technology, Inc. | Dilute cleaning composition |
US6313048B1 (en) | 1997-03-03 | 2001-11-06 | Micron Technology, Inc. | Dilute cleaning composition and method for using same |
US6486108B1 (en) | 2000-05-31 | 2002-11-26 | Micron Technology, Inc. | Cleaning composition useful in semiconductor integrated circuit fabrication |
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1973
- 1973-08-06 JP JP8754673A patent/JPS5248059B2/ja not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPS5037372A (en) | 1975-04-08 |