JPS5247660B2 - - Google Patents
Info
- Publication number
- JPS5247660B2 JPS5247660B2 JP46092063A JP9206371A JPS5247660B2 JP S5247660 B2 JPS5247660 B2 JP S5247660B2 JP 46092063 A JP46092063 A JP 46092063A JP 9206371 A JP9206371 A JP 9206371A JP S5247660 B2 JPS5247660 B2 JP S5247660B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
- H01J3/02—Electron guns
- H01J3/026—Eliminating deleterious effects due to thermal effects, electric or magnetic field
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
- H01J37/065—Construction of guns or parts thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
- H01J37/07—Eliminating deleterious effects due to thermal effects or electric or magnetic fields
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/24—Circuit arrangements not adapted to a particular application of the tube and not otherwise provided for
- H01J37/241—High voltage power supply or regulation circuits
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Sources, Ion Sources (AREA)
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP46092063A JPS5247660B2 (en:Method) | 1971-11-17 | 1971-11-17 | |
| US00246895A US3808498A (en) | 1971-11-17 | 1972-04-24 | Electron beam generating source |
| DE19722221139 DE2221139B2 (de) | 1971-05-12 | 1972-04-28 | Elektronenstrahlquelle für Korpuskularstrahlapparate |
| NL7206289A NL7206289A (en:Method) | 1971-05-12 | 1972-05-10 | |
| GB2196072A GB1396038A (en) | 1971-05-12 | 1972-05-10 | Charged particle accelerating device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP46092063A JPS5247660B2 (en:Method) | 1971-11-17 | 1971-11-17 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4856366A JPS4856366A (en:Method) | 1973-08-08 |
| JPS5247660B2 true JPS5247660B2 (en:Method) | 1977-12-03 |
Family
ID=14044005
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP46092063A Expired JPS5247660B2 (en:Method) | 1971-05-12 | 1971-11-17 |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | US3808498A (en:Method) |
| JP (1) | JPS5247660B2 (en:Method) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54143376U (en:Method) * | 1978-03-29 | 1979-10-04 |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS529971B2 (en:Method) * | 1973-07-02 | 1977-03-19 | ||
| EP0473216B1 (en) * | 1990-08-10 | 1997-03-19 | Koninklijke Philips Electronics N.V. | Charged particle beam device |
| JP2001056395A (ja) * | 1999-06-11 | 2001-02-27 | Ramuda:Kk | マイナスイオン放射方法及びその装置 |
| CN115428114B (zh) * | 2020-04-23 | 2025-07-04 | 株式会社日立高新技术 | 带电粒子枪以及带电粒子束系统 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3021446A (en) * | 1954-05-15 | 1962-02-13 | Patelhold Patentverwertung | Gaseous electric discharge tube |
-
1971
- 1971-11-17 JP JP46092063A patent/JPS5247660B2/ja not_active Expired
-
1972
- 1972-04-24 US US00246895A patent/US3808498A/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54143376U (en:Method) * | 1978-03-29 | 1979-10-04 |
Also Published As
| Publication number | Publication date |
|---|---|
| US3808498A (en) | 1974-04-30 |
| JPS4856366A (en:Method) | 1973-08-08 |