JPS5247660B2 - - Google Patents

Info

Publication number
JPS5247660B2
JPS5247660B2 JP46092063A JP9206371A JPS5247660B2 JP S5247660 B2 JPS5247660 B2 JP S5247660B2 JP 46092063 A JP46092063 A JP 46092063A JP 9206371 A JP9206371 A JP 9206371A JP S5247660 B2 JPS5247660 B2 JP S5247660B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP46092063A
Other languages
Japanese (ja)
Other versions
JPS4856366A (de
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP46092063A priority Critical patent/JPS5247660B2/ja
Priority to US00246895A priority patent/US3808498A/en
Priority to DE19722221139 priority patent/DE2221139B2/de
Priority to NL7206289A priority patent/NL7206289A/xx
Priority to GB2196072A priority patent/GB1396038A/en
Publication of JPS4856366A publication Critical patent/JPS4856366A/ja
Publication of JPS5247660B2 publication Critical patent/JPS5247660B2/ja
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
    • H01J3/02—Electron guns
    • H01J3/026—Eliminating deleterious effects due to thermal effects, electric or magnetic field
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/065—Construction of guns or parts thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/07—Eliminating deleterious effects due to thermal effects or electric or magnetic fields
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/24—Circuit arrangements not adapted to a particular application of the tube and not otherwise provided for
    • H01J37/241—High voltage power supply or regulation circuits

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
JP46092063A 1971-05-12 1971-11-17 Expired JPS5247660B2 (de)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP46092063A JPS5247660B2 (de) 1971-11-17 1971-11-17
US00246895A US3808498A (en) 1971-11-17 1972-04-24 Electron beam generating source
DE19722221139 DE2221139B2 (de) 1971-05-12 1972-04-28 Elektronenstrahlquelle für Korpuskularstrahlapparate
NL7206289A NL7206289A (de) 1971-05-12 1972-05-10
GB2196072A GB1396038A (en) 1971-05-12 1972-05-10 Charged particle accelerating device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP46092063A JPS5247660B2 (de) 1971-11-17 1971-11-17

Publications (2)

Publication Number Publication Date
JPS4856366A JPS4856366A (de) 1973-08-08
JPS5247660B2 true JPS5247660B2 (de) 1977-12-03

Family

ID=14044005

Family Applications (1)

Application Number Title Priority Date Filing Date
JP46092063A Expired JPS5247660B2 (de) 1971-05-12 1971-11-17

Country Status (2)

Country Link
US (1) US3808498A (de)
JP (1) JPS5247660B2 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54143376U (de) * 1978-03-29 1979-10-04

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS529971B2 (de) * 1973-07-02 1977-03-19
DE69125229T2 (de) * 1990-08-10 1997-08-28 Koninkl Philips Electronics Nv Ladungspartikelstrahlanordnung
JP2001056395A (ja) * 1999-06-11 2001-02-27 Ramuda:Kk マイナスイオン放射方法及びその装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3021446A (en) * 1954-05-15 1962-02-13 Patelhold Patentverwertung Gaseous electric discharge tube

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54143376U (de) * 1978-03-29 1979-10-04

Also Published As

Publication number Publication date
US3808498A (en) 1974-04-30
JPS4856366A (de) 1973-08-08

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