JPS5247660B2 - - Google Patents

Info

Publication number
JPS5247660B2
JPS5247660B2 JP46092063A JP9206371A JPS5247660B2 JP S5247660 B2 JPS5247660 B2 JP S5247660B2 JP 46092063 A JP46092063 A JP 46092063A JP 9206371 A JP9206371 A JP 9206371A JP S5247660 B2 JPS5247660 B2 JP S5247660B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP46092063A
Other languages
Japanese (ja)
Other versions
JPS4856366A (cg-RX-API-DMAC10.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP46092063A priority Critical patent/JPS5247660B2/ja
Priority to US00246895A priority patent/US3808498A/en
Priority to DE19722221139 priority patent/DE2221139B2/de
Priority to GB2196072A priority patent/GB1396038A/en
Priority to NL7206289A priority patent/NL7206289A/xx
Publication of JPS4856366A publication Critical patent/JPS4856366A/ja
Publication of JPS5247660B2 publication Critical patent/JPS5247660B2/ja
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J3/00—Details of electron-optical or ion-optical arrangements common to two or more basic types of discharge tubes or lamps
    • H01J3/02—Electron guns
    • H01J3/026—Eliminating deleterious effects due to thermal effects, electric or magnetic field
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/065—Construction of guns or parts thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/07—Eliminating deleterious effects due to thermal effects or electric or magnetic fields
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/24—Circuit arrangements not adapted to a particular application of the tube and not otherwise provided for
    • H01J37/241—High voltage power supply or regulation circuits

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
JP46092063A 1971-05-12 1971-11-17 Expired JPS5247660B2 (cg-RX-API-DMAC10.html)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP46092063A JPS5247660B2 (cg-RX-API-DMAC10.html) 1971-11-17 1971-11-17
US00246895A US3808498A (en) 1971-11-17 1972-04-24 Electron beam generating source
DE19722221139 DE2221139B2 (de) 1971-05-12 1972-04-28 Elektronenstrahlquelle für Korpuskularstrahlapparate
GB2196072A GB1396038A (en) 1971-05-12 1972-05-10 Charged particle accelerating device
NL7206289A NL7206289A (cg-RX-API-DMAC10.html) 1971-05-12 1972-05-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP46092063A JPS5247660B2 (cg-RX-API-DMAC10.html) 1971-11-17 1971-11-17

Publications (2)

Publication Number Publication Date
JPS4856366A JPS4856366A (cg-RX-API-DMAC10.html) 1973-08-08
JPS5247660B2 true JPS5247660B2 (cg-RX-API-DMAC10.html) 1977-12-03

Family

ID=14044005

Family Applications (1)

Application Number Title Priority Date Filing Date
JP46092063A Expired JPS5247660B2 (cg-RX-API-DMAC10.html) 1971-05-12 1971-11-17

Country Status (2)

Country Link
US (1) US3808498A (cg-RX-API-DMAC10.html)
JP (1) JPS5247660B2 (cg-RX-API-DMAC10.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54143376U (cg-RX-API-DMAC10.html) * 1978-03-29 1979-10-04

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS529971B2 (cg-RX-API-DMAC10.html) * 1973-07-02 1977-03-19
DE69131869T2 (de) * 1990-08-10 2000-11-02 Koninklijke Philips Electronics N.V., Eindhoven Ladungsträgerstrahl-Vorrichtung
JP2001056395A (ja) * 1999-06-11 2001-02-27 Ramuda:Kk マイナスイオン放射方法及びその装置
US12469664B2 (en) * 2020-04-23 2025-11-11 Hitachi High-Tech Corporation Charged particle gun and charged particle beam system

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3021446A (en) * 1954-05-15 1962-02-13 Patelhold Patentverwertung Gaseous electric discharge tube

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54143376U (cg-RX-API-DMAC10.html) * 1978-03-29 1979-10-04

Also Published As

Publication number Publication date
US3808498A (en) 1974-04-30
JPS4856366A (cg-RX-API-DMAC10.html) 1973-08-08

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