JPS5245592A - Method of coating corrosion resistant substance on heating material - Google Patents

Method of coating corrosion resistant substance on heating material

Info

Publication number
JPS5245592A
JPS5245592A JP9376475A JP9376475A JPS5245592A JP S5245592 A JPS5245592 A JP S5245592A JP 9376475 A JP9376475 A JP 9376475A JP 9376475 A JP9376475 A JP 9376475A JP S5245592 A JPS5245592 A JP S5245592A
Authority
JP
Japan
Prior art keywords
corrosion resistant
heating material
coating corrosion
resistant substance
coating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9376475A
Other languages
Japanese (ja)
Inventor
Yasushi Kawashita
Masami Nakasone
Akira Suzuki
Katsuhiro Sakai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shinko Seiki Co Ltd
Original Assignee
Shinko Seiki Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shinko Seiki Co Ltd filed Critical Shinko Seiki Co Ltd
Priority to JP9376475A priority Critical patent/JPS5245592A/en
Publication of JPS5245592A publication Critical patent/JPS5245592A/en
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation

Abstract

PURPOSE:A method of coating corrosin resistant substances such as TiC,TiN, etc. on heating materials such as a heater for evaporation source for vacuum evaporation, etc. without changing properties of the base materials.
JP9376475A 1975-07-31 1975-07-31 Method of coating corrosion resistant substance on heating material Pending JPS5245592A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9376475A JPS5245592A (en) 1975-07-31 1975-07-31 Method of coating corrosion resistant substance on heating material

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9376475A JPS5245592A (en) 1975-07-31 1975-07-31 Method of coating corrosion resistant substance on heating material

Publications (1)

Publication Number Publication Date
JPS5245592A true JPS5245592A (en) 1977-04-11

Family

ID=14091485

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9376475A Pending JPS5245592A (en) 1975-07-31 1975-07-31 Method of coating corrosion resistant substance on heating material

Country Status (1)

Country Link
JP (1) JPS5245592A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS546876A (en) * 1977-06-17 1979-01-19 Shinko Seiki Method of forming colored coat over metal surface

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4922385A (en) * 1972-06-21 1974-02-27

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4922385A (en) * 1972-06-21 1974-02-27

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS546876A (en) * 1977-06-17 1979-01-19 Shinko Seiki Method of forming colored coat over metal surface

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