JPS5244852Y2 - - Google Patents

Info

Publication number
JPS5244852Y2
JPS5244852Y2 JP1972125453U JP12545372U JPS5244852Y2 JP S5244852 Y2 JPS5244852 Y2 JP S5244852Y2 JP 1972125453 U JP1972125453 U JP 1972125453U JP 12545372 U JP12545372 U JP 12545372U JP S5244852 Y2 JPS5244852 Y2 JP S5244852Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1972125453U
Other languages
Japanese (ja)
Other versions
JPS4980848U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1972125453U priority Critical patent/JPS5244852Y2/ja
Priority to DE19732354592 priority patent/DE2354592A1/de
Publication of JPS4980848U publication Critical patent/JPS4980848U/ja
Application granted granted Critical
Publication of JPS5244852Y2 publication Critical patent/JPS5244852Y2/ja
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26—Processing photosensitive materials; Apparatus therefor
    • G03F7/30—Imagewise removal using liquid means
    • G03F7/3014—Imagewise removal using liquid means combined with ultrasonic means
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03D—APPARATUS FOR PROCESSING EXPOSED PHOTOGRAPHIC MATERIALS; ACCESSORIES THEREFOR
    • G03D13/00—Processing apparatus or accessories therefor, not covered by groups G11B3/00 - G11B11/00
    • G03D13/02—Containers; Holding-devices
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03D—APPARATUS FOR PROCESSING EXPOSED PHOTOGRAPHIC MATERIALS; ACCESSORIES THEREFOR
    • G03D3/00—Liquid processing apparatus involving immersion; Washing apparatus involving immersion
    • G03D3/02—Details of liquid circulation
    • G03D3/04—Liquid agitators

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Photographic Processing Devices Using Wet Methods (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
JP1972125453U 1972-11-01 1972-11-01 Expired JPS5244852Y2 (enrdf_load_stackoverflow)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP1972125453U JPS5244852Y2 (enrdf_load_stackoverflow) 1972-11-01 1972-11-01
DE19732354592 DE2354592A1 (de) 1972-11-01 1973-10-31 Photoresist-entwicklungsverfahren und vorrichtung zur durchfuehrung desselben

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1972125453U JPS5244852Y2 (enrdf_load_stackoverflow) 1972-11-01 1972-11-01

Publications (2)

Publication Number Publication Date
JPS4980848U JPS4980848U (enrdf_load_stackoverflow) 1974-07-12
JPS5244852Y2 true JPS5244852Y2 (enrdf_load_stackoverflow) 1977-10-12

Family

ID=14910454

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1972125453U Expired JPS5244852Y2 (enrdf_load_stackoverflow) 1972-11-01 1972-11-01

Country Status (2)

Country Link
JP (1) JPS5244852Y2 (enrdf_load_stackoverflow)
DE (1) DE2354592A1 (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3122544A1 (de) * 1981-06-05 1982-12-30 Siemens AG, 1000 Berlin und 8000 München Verfahren und vorrichtung zum aetzen von durchbruechen in glasplatten

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
CIRCUITS MANUFACTURING=1972 *

Also Published As

Publication number Publication date
DE2354592A1 (de) 1974-05-09
JPS4980848U (enrdf_load_stackoverflow) 1974-07-12

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