JPS5242489Y2 - - Google Patents
Info
- Publication number
- JPS5242489Y2 JPS5242489Y2 JP2005971U JP2005971U JPS5242489Y2 JP S5242489 Y2 JPS5242489 Y2 JP S5242489Y2 JP 2005971 U JP2005971 U JP 2005971U JP 2005971 U JP2005971 U JP 2005971U JP S5242489 Y2 JPS5242489 Y2 JP S5242489Y2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005971U JPS5242489Y2 (sv) | 1971-03-24 | 1971-03-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005971U JPS5242489Y2 (sv) | 1971-03-24 | 1971-03-24 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4716051U JPS4716051U (sv) | 1972-10-25 |
| JPS5242489Y2 true JPS5242489Y2 (sv) | 1977-09-27 |
Family
ID=27873289
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2005971U Expired JPS5242489Y2 (sv) | 1971-03-24 | 1971-03-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5242489Y2 (sv) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50160890A (sv) * | 1974-06-18 | 1975-12-26 | ||
| JPS5145690U (sv) * | 1974-10-02 | 1976-04-03 | ||
| JPS54100581A (en) * | 1978-01-25 | 1979-08-08 | Tipton Mfg Corp | Method and device for deburring |
| JPS588949U (ja) * | 1981-07-09 | 1983-01-20 | 日本真空技術株式会社 | ウエハの搬送装置 |
-
1971
- 1971-03-24 JP JP2005971U patent/JPS5242489Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4716051U (sv) | 1972-10-25 |