JPS5242489Y2 - - Google Patents

Info

Publication number
JPS5242489Y2
JPS5242489Y2 JP2005971U JP2005971U JPS5242489Y2 JP S5242489 Y2 JPS5242489 Y2 JP S5242489Y2 JP 2005971 U JP2005971 U JP 2005971U JP 2005971 U JP2005971 U JP 2005971U JP S5242489 Y2 JPS5242489 Y2 JP S5242489Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP2005971U
Other languages
Japanese (ja)
Other versions
JPS4716051U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2005971U priority Critical patent/JPS5242489Y2/ja
Publication of JPS4716051U publication Critical patent/JPS4716051U/ja
Application granted granted Critical
Publication of JPS5242489Y2 publication Critical patent/JPS5242489Y2/ja
Expired legal-status Critical Current

Links

JP2005971U 1971-03-24 1971-03-24 Expired JPS5242489Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2005971U JPS5242489Y2 (enrdf_load_stackoverflow) 1971-03-24 1971-03-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005971U JPS5242489Y2 (enrdf_load_stackoverflow) 1971-03-24 1971-03-24

Publications (2)

Publication Number Publication Date
JPS4716051U JPS4716051U (enrdf_load_stackoverflow) 1972-10-25
JPS5242489Y2 true JPS5242489Y2 (enrdf_load_stackoverflow) 1977-09-27

Family

ID=27873289

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005971U Expired JPS5242489Y2 (enrdf_load_stackoverflow) 1971-03-24 1971-03-24

Country Status (1)

Country Link
JP (1) JPS5242489Y2 (enrdf_load_stackoverflow)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50160890A (enrdf_load_stackoverflow) * 1974-06-18 1975-12-26
JPS5145690U (enrdf_load_stackoverflow) * 1974-10-02 1976-04-03
JPS54100581A (en) * 1978-01-25 1979-08-08 Tipton Mfg Corp Method and device for deburring
JPS588949U (ja) * 1981-07-09 1983-01-20 日本真空技術株式会社 ウエハの搬送装置

Also Published As

Publication number Publication date
JPS4716051U (enrdf_load_stackoverflow) 1972-10-25

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