JPS5241153B2 - - Google Patents
Info
- Publication number
- JPS5241153B2 JPS5241153B2 JP11606173A JP11606173A JPS5241153B2 JP S5241153 B2 JPS5241153 B2 JP S5241153B2 JP 11606173 A JP11606173 A JP 11606173A JP 11606173 A JP11606173 A JP 11606173A JP S5241153 B2 JPS5241153 B2 JP S5241153B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Pressure Sensors (AREA)
- Weting (AREA)
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11606173A JPS5241153B2 (en) | 1973-10-15 | 1973-10-15 | |
| US476620A US3912563A (en) | 1973-06-05 | 1974-06-05 | Method of making semiconductor piezoresistive strain transducer |
| CA202,036A CA994005A (en) | 1973-06-05 | 1974-06-10 | Method of making semiconductor piezoresistive strain transducer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11606173A JPS5241153B2 (en) | 1973-10-15 | 1973-10-15 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5067596A JPS5067596A (en) | 1975-06-06 |
| JPS5241153B2 true JPS5241153B2 (en) | 1977-10-17 |
Family
ID=14677728
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11606173A Expired JPS5241153B2 (en) | 1973-06-05 | 1973-10-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5241153B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05168202A (en) * | 1991-12-13 | 1993-07-02 | Sankyo Seiki Mfg Co Ltd | Manufacture of thin type coil |
-
1973
- 1973-10-15 JP JP11606173A patent/JPS5241153B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5067596A (en) | 1975-06-06 |