JPS5239073U - - Google Patents
Info
- Publication number
- JPS5239073U JPS5239073U JP12535175U JP12535175U JPS5239073U JP S5239073 U JPS5239073 U JP S5239073U JP 12535175 U JP12535175 U JP 12535175U JP 12535175 U JP12535175 U JP 12535175U JP S5239073 U JPS5239073 U JP S5239073U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12535175U JPS5436621Y2 (cg-RX-API-DMAC7.html) | 1975-09-11 | 1975-09-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12535175U JPS5436621Y2 (cg-RX-API-DMAC7.html) | 1975-09-11 | 1975-09-11 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5239073U true JPS5239073U (cg-RX-API-DMAC7.html) | 1977-03-19 |
| JPS5436621Y2 JPS5436621Y2 (cg-RX-API-DMAC7.html) | 1979-11-05 |
Family
ID=28605841
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12535175U Expired JPS5436621Y2 (cg-RX-API-DMAC7.html) | 1975-09-11 | 1975-09-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5436621Y2 (cg-RX-API-DMAC7.html) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52127065A (en) * | 1976-04-16 | 1977-10-25 | Matsushita Electric Ind Co Ltd | Gas phase growing method of semiconductor and its device |
| JPS60182128A (ja) * | 1984-02-29 | 1985-09-17 | Hitachi Ltd | 薄膜形成装置 |
| JPS61279120A (ja) * | 1985-06-05 | 1986-12-09 | Matsushita Electric Ind Co Ltd | 気相成長装置 |
-
1975
- 1975-09-11 JP JP12535175U patent/JPS5436621Y2/ja not_active Expired
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52127065A (en) * | 1976-04-16 | 1977-10-25 | Matsushita Electric Ind Co Ltd | Gas phase growing method of semiconductor and its device |
| JPS60182128A (ja) * | 1984-02-29 | 1985-09-17 | Hitachi Ltd | 薄膜形成装置 |
| JPS61279120A (ja) * | 1985-06-05 | 1986-12-09 | Matsushita Electric Ind Co Ltd | 気相成長装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5436621Y2 (cg-RX-API-DMAC7.html) | 1979-11-05 |