JPS5239073U - - Google Patents

Info

Publication number
JPS5239073U
JPS5239073U JP1975125351U JP12535175U JPS5239073U JP S5239073 U JPS5239073 U JP S5239073U JP 1975125351 U JP1975125351 U JP 1975125351U JP 12535175 U JP12535175 U JP 12535175U JP S5239073 U JPS5239073 U JP S5239073U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1975125351U
Other languages
Japanese (ja)
Other versions
JPS5436621Y2 (cg-RX-API-DMAC7.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1975125351U priority Critical patent/JPS5436621Y2/ja
Publication of JPS5239073U publication Critical patent/JPS5239073U/ja
Application granted granted Critical
Publication of JPS5436621Y2 publication Critical patent/JPS5436621Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)
JP1975125351U 1975-09-11 1975-09-11 Expired JPS5436621Y2 (cg-RX-API-DMAC7.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1975125351U JPS5436621Y2 (cg-RX-API-DMAC7.html) 1975-09-11 1975-09-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1975125351U JPS5436621Y2 (cg-RX-API-DMAC7.html) 1975-09-11 1975-09-11

Publications (2)

Publication Number Publication Date
JPS5239073U true JPS5239073U (cg-RX-API-DMAC7.html) 1977-03-19
JPS5436621Y2 JPS5436621Y2 (cg-RX-API-DMAC7.html) 1979-11-05

Family

ID=28605841

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1975125351U Expired JPS5436621Y2 (cg-RX-API-DMAC7.html) 1975-09-11 1975-09-11

Country Status (1)

Country Link
JP (1) JPS5436621Y2 (cg-RX-API-DMAC7.html)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52127065A (en) * 1976-04-16 1977-10-25 Matsushita Electric Ind Co Ltd Gas phase growing method of semiconductor and its device
JPS60182128A (ja) * 1984-02-29 1985-09-17 Hitachi Ltd 薄膜形成装置
JPS61279120A (ja) * 1985-06-05 1986-12-09 Matsushita Electric Ind Co Ltd 気相成長装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52127065A (en) * 1976-04-16 1977-10-25 Matsushita Electric Ind Co Ltd Gas phase growing method of semiconductor and its device
JPS60182128A (ja) * 1984-02-29 1985-09-17 Hitachi Ltd 薄膜形成装置
JPS61279120A (ja) * 1985-06-05 1986-12-09 Matsushita Electric Ind Co Ltd 気相成長装置

Also Published As

Publication number Publication date
JPS5436621Y2 (cg-RX-API-DMAC7.html) 1979-11-05

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