JPS5239073U - - Google Patents

Info

Publication number
JPS5239073U
JPS5239073U JP12535175U JP12535175U JPS5239073U JP S5239073 U JPS5239073 U JP S5239073U JP 12535175 U JP12535175 U JP 12535175U JP 12535175 U JP12535175 U JP 12535175U JP S5239073 U JPS5239073 U JP S5239073U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12535175U
Other versions
JPS5436621Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12535175U priority Critical patent/JPS5436621Y2/ja
Publication of JPS5239073U publication Critical patent/JPS5239073U/ja
Application granted granted Critical
Publication of JPS5436621Y2 publication Critical patent/JPS5436621Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)
JP12535175U 1975-09-11 1975-09-11 Expired JPS5436621Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12535175U JPS5436621Y2 (ja) 1975-09-11 1975-09-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12535175U JPS5436621Y2 (ja) 1975-09-11 1975-09-11

Publications (2)

Publication Number Publication Date
JPS5239073U true JPS5239073U (ja) 1977-03-19
JPS5436621Y2 JPS5436621Y2 (ja) 1979-11-05

Family

ID=28605841

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12535175U Expired JPS5436621Y2 (ja) 1975-09-11 1975-09-11

Country Status (1)

Country Link
JP (1) JPS5436621Y2 (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52127065A (en) * 1976-04-16 1977-10-25 Matsushita Electric Ind Co Ltd Gas phase growing method of semiconductor and its device
JPS60182128A (ja) * 1984-02-29 1985-09-17 Hitachi Ltd 薄膜形成装置
JPS61279120A (ja) * 1985-06-05 1986-12-09 Matsushita Electric Ind Co Ltd 気相成長装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52127065A (en) * 1976-04-16 1977-10-25 Matsushita Electric Ind Co Ltd Gas phase growing method of semiconductor and its device
JPS60182128A (ja) * 1984-02-29 1985-09-17 Hitachi Ltd 薄膜形成装置
JPS61279120A (ja) * 1985-06-05 1986-12-09 Matsushita Electric Ind Co Ltd 気相成長装置

Also Published As

Publication number Publication date
JPS5436621Y2 (ja) 1979-11-05

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