JPS5238804B2 - - Google Patents
Info
- Publication number
- JPS5238804B2 JPS5238804B2 JP7225373A JP7225373A JPS5238804B2 JP S5238804 B2 JPS5238804 B2 JP S5238804B2 JP 7225373 A JP7225373 A JP 7225373A JP 7225373 A JP7225373 A JP 7225373A JP S5238804 B2 JPS5238804 B2 JP S5238804B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Nozzles (AREA)
- Heat Treatments In General, Especially Conveying And Cooling (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7225373A JPS5238804B2 (enExample) | 1973-06-28 | 1973-06-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7225373A JPS5238804B2 (enExample) | 1973-06-28 | 1973-06-28 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5021911A JPS5021911A (enExample) | 1975-03-08 |
| JPS5238804B2 true JPS5238804B2 (enExample) | 1977-10-01 |
Family
ID=13483932
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7225373A Expired JPS5238804B2 (enExample) | 1973-06-28 | 1973-06-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5238804B2 (enExample) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004237282A (ja) * | 2003-01-16 | 2004-08-26 | Kyoritsu Gokin Co Ltd | 二流体ノズル |
| DE102007023444B4 (de) * | 2007-05-16 | 2009-04-09 | Xtreme Technologies Gmbh | Einrichtung zur Erzeugung eines Gasvorhangs für plasmabasierte EUV-Strahlungsquellen |
| KR20220089390A (ko) * | 2020-12-21 | 2022-06-28 | 세메스 주식회사 | 온도 조절 장치 |
-
1973
- 1973-06-28 JP JP7225373A patent/JPS5238804B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5021911A (enExample) | 1975-03-08 |