JPS5238804B2 - - Google Patents

Info

Publication number
JPS5238804B2
JPS5238804B2 JP7225373A JP7225373A JPS5238804B2 JP S5238804 B2 JPS5238804 B2 JP S5238804B2 JP 7225373 A JP7225373 A JP 7225373A JP 7225373 A JP7225373 A JP 7225373A JP S5238804 B2 JPS5238804 B2 JP S5238804B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP7225373A
Other languages
Japanese (ja)
Other versions
JPS5021911A (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7225373A priority Critical patent/JPS5238804B2/ja
Publication of JPS5021911A publication Critical patent/JPS5021911A/ja
Publication of JPS5238804B2 publication Critical patent/JPS5238804B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Nozzles (AREA)
  • Heat Treatments In General, Especially Conveying And Cooling (AREA)
JP7225373A 1973-06-28 1973-06-28 Expired JPS5238804B2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7225373A JPS5238804B2 (enrdf_load_stackoverflow) 1973-06-28 1973-06-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7225373A JPS5238804B2 (enrdf_load_stackoverflow) 1973-06-28 1973-06-28

Publications (2)

Publication Number Publication Date
JPS5021911A JPS5021911A (enrdf_load_stackoverflow) 1975-03-08
JPS5238804B2 true JPS5238804B2 (enrdf_load_stackoverflow) 1977-10-01

Family

ID=13483932

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7225373A Expired JPS5238804B2 (enrdf_load_stackoverflow) 1973-06-28 1973-06-28

Country Status (1)

Country Link
JP (1) JPS5238804B2 (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004237282A (ja) * 2003-01-16 2004-08-26 Kyoritsu Gokin Co Ltd 二流体ノズル
DE102007023444B4 (de) * 2007-05-16 2009-04-09 Xtreme Technologies Gmbh Einrichtung zur Erzeugung eines Gasvorhangs für plasmabasierte EUV-Strahlungsquellen
KR20220089390A (ko) * 2020-12-21 2022-06-28 세메스 주식회사 온도 조절 장치

Also Published As

Publication number Publication date
JPS5021911A (enrdf_load_stackoverflow) 1975-03-08

Similar Documents

Publication Publication Date Title
AU476761B2 (enrdf_load_stackoverflow)
AR201235Q (enrdf_load_stackoverflow)
AR201231Q (enrdf_load_stackoverflow)
AU474593B2 (enrdf_load_stackoverflow)
AU474511B2 (enrdf_load_stackoverflow)
AU474838B2 (enrdf_load_stackoverflow)
AU465453B2 (enrdf_load_stackoverflow)
AU471343B2 (enrdf_load_stackoverflow)
AU465434B2 (enrdf_load_stackoverflow)
AU476714B2 (enrdf_load_stackoverflow)
AR201229Q (enrdf_load_stackoverflow)
AU472848B2 (enrdf_load_stackoverflow)
AU466283B2 (enrdf_load_stackoverflow)
AU476696B2 (enrdf_load_stackoverflow)
JPS5021911A (enrdf_load_stackoverflow)
AU477823B2 (enrdf_load_stackoverflow)
AU477824B2 (enrdf_load_stackoverflow)
AU471461B2 (enrdf_load_stackoverflow)
AR196382A1 (enrdf_load_stackoverflow)
AU476873B1 (enrdf_load_stackoverflow)
AU6610374A (enrdf_load_stackoverflow)
AR196212Q (enrdf_load_stackoverflow)
CH559975A5 (enrdf_load_stackoverflow)
AU479562A (enrdf_load_stackoverflow)
AU479496A (enrdf_load_stackoverflow)