JPS52376B2 - - Google Patents
Info
- Publication number
- JPS52376B2 JPS52376B2 JP13680373A JP13680373A JPS52376B2 JP S52376 B2 JPS52376 B2 JP S52376B2 JP 13680373 A JP13680373 A JP 13680373A JP 13680373 A JP13680373 A JP 13680373A JP S52376 B2 JPS52376 B2 JP S52376B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Photosensitive Polymer And Photoresist Processing (AREA)
- Manufacturing Of Printed Circuit Boards (AREA)
- Drying Of Semiconductors (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13680373A JPS52376B2 (en) | 1973-12-10 | 1973-12-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13680373A JPS52376B2 (en) | 1973-12-10 | 1973-12-10 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5090330A JPS5090330A (en) | 1975-07-19 |
| JPS52376B2 true JPS52376B2 (en) | 1977-01-07 |
Family
ID=15183869
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13680373A Expired JPS52376B2 (en) | 1973-12-10 | 1973-12-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS52376B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2726813C2 (en) * | 1976-06-17 | 1984-02-23 | Motorola, Inc., 60196 Schaumburg, Ill. | Method of making a patterned substrate |
-
1973
- 1973-12-10 JP JP13680373A patent/JPS52376B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5090330A (en) | 1975-07-19 |