JPS5236479B2 - - Google Patents
Info
- Publication number
- JPS5236479B2 JPS5236479B2 JP245573A JP245573A JPS5236479B2 JP S5236479 B2 JPS5236479 B2 JP S5236479B2 JP 245573 A JP245573 A JP 245573A JP 245573 A JP245573 A JP 245573A JP S5236479 B2 JPS5236479 B2 JP S5236479B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP245573A JPS5236479B2 (ja) | 1972-12-28 | 1972-12-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP245573A JPS5236479B2 (ja) | 1972-12-28 | 1972-12-28 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4988697A JPS4988697A (ja) | 1974-08-24 |
| JPS5236479B2 true JPS5236479B2 (ja) | 1977-09-16 |
Family
ID=11529753
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP245573A Expired JPS5236479B2 (ja) | 1972-12-28 | 1972-12-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5236479B2 (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57166046A (en) * | 1981-04-06 | 1982-10-13 | Nippon Telegr & Teleph Corp <Ntt> | Wafer transferring device |
-
1972
- 1972-12-28 JP JP245573A patent/JPS5236479B2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57166046A (en) * | 1981-04-06 | 1982-10-13 | Nippon Telegr & Teleph Corp <Ntt> | Wafer transferring device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4988697A (ja) | 1974-08-24 |