JPS5235545B2 - - Google Patents
Info
- Publication number
- JPS5235545B2 JPS5235545B2 JP5008173A JP5008173A JPS5235545B2 JP S5235545 B2 JPS5235545 B2 JP S5235545B2 JP 5008173 A JP5008173 A JP 5008173A JP 5008173 A JP5008173 A JP 5008173A JP S5235545 B2 JPS5235545 B2 JP S5235545B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Thermally Actuated Switches (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5008173A JPS5235545B2 (https=) | 1973-05-02 | 1973-05-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5008173A JPS5235545B2 (https=) | 1973-05-02 | 1973-05-02 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS501783A JPS501783A (https=) | 1975-01-09 |
| JPS5235545B2 true JPS5235545B2 (https=) | 1977-09-09 |
Family
ID=12849051
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5008173A Expired JPS5235545B2 (https=) | 1973-05-02 | 1973-05-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5235545B2 (https=) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6040186B2 (ja) * | 1976-11-04 | 1985-09-10 | 富士通株式会社 | 磁場形成装置 |
| JPS53119496A (en) * | 1977-03-28 | 1978-10-18 | Nippon Electron Optics Lab | Electron ray expososing method |
| JPS52120686A (en) * | 1977-04-21 | 1977-10-11 | Jeol Ltd | Electronic ray exposure method |
| JPS5595325A (en) * | 1979-01-13 | 1980-07-19 | Nippon Telegr & Teleph Corp <Ntt> | Detecting device of marking position for electron beam exposure apparatus |
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1973
- 1973-05-02 JP JP5008173A patent/JPS5235545B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS501783A (https=) | 1975-01-09 |