JPS5234905B2 - - Google Patents

Info

Publication number
JPS5234905B2
JPS5234905B2 JP10991674A JP10991674A JPS5234905B2 JP S5234905 B2 JPS5234905 B2 JP S5234905B2 JP 10991674 A JP10991674 A JP 10991674A JP 10991674 A JP10991674 A JP 10991674A JP S5234905 B2 JPS5234905 B2 JP S5234905B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP10991674A
Other languages
Japanese (ja)
Other versions
JPS5127066A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS5127066A publication Critical patent/JPS5127066A/en
Publication of JPS5234905B2 publication Critical patent/JPS5234905B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
    • C30B31/06—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state
    • C30B31/10—Reaction chambers; Selection of materials therefor
JP10991674A 1973-11-06 1974-09-24 HANDOTAIBUTSUSHITSUKARANARUCHUKUTAINOSEIZOHOHO Granted JPS5127066A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19732355413 DE2355413A1 (en) 1973-11-06 1973-11-06 Hollow semiconductor parts prodn. - by deposition from gas phase, providing getter coating and heating, preventing contamination

Publications (2)

Publication Number Publication Date
JPS5127066A JPS5127066A (en) 1976-03-06
JPS5234905B2 true JPS5234905B2 (en) 1977-09-06

Family

ID=5897319

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10991674A Granted JPS5127066A (en) 1973-11-06 1974-09-24 HANDOTAIBUTSUSHITSUKARANARUCHUKUTAINOSEIZOHOHO

Country Status (2)

Country Link
JP (1) JPS5127066A (en)
DE (1) DE2355413A1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5189817U (en) * 1975-01-13 1976-07-19

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4413724A (en) * 1981-05-18 1983-11-08 Mapatent, N.V. Horizontal accumulator

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5189817U (en) * 1975-01-13 1976-07-19

Also Published As

Publication number Publication date
DE2355413A1 (en) 1975-05-22
JPS5127066A (en) 1976-03-06

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