JPS5234039B2 - - Google Patents

Info

Publication number
JPS5234039B2
JPS5234039B2 JP48061799A JP6179973A JPS5234039B2 JP S5234039 B2 JPS5234039 B2 JP S5234039B2 JP 48061799 A JP48061799 A JP 48061799A JP 6179973 A JP6179973 A JP 6179973A JP S5234039 B2 JPS5234039 B2 JP S5234039B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP48061799A
Other languages
Japanese (ja)
Other versions
JPS5010288A (US07922777-20110412-C00004.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP48061799A priority Critical patent/JPS5234039B2/ja
Priority to US459955A priority patent/US3927638A/en
Priority to DE19742426687 priority patent/DE2426687A1/de
Priority to FR7419236A priority patent/FR2232077B1/fr
Priority to NL7407523A priority patent/NL7407523A/xx
Publication of JPS5010288A publication Critical patent/JPS5010288A/ja
Publication of JPS5234039B2 publication Critical patent/JPS5234039B2/ja
Expired legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0623Sulfides, selenides or tellurides
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24Vacuum evaporation
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03GELECTROGRAPHY; ELECTROPHOTOGRAPHY; MAGNETOGRAPHY
    • G03G5/00Recording members for original recording by exposure, e.g. to light, to heat, to electrons; Manufacture thereof; Selection of materials therefor
    • G03G5/02Charge-receiving layers
    • G03G5/04Photoconductive layers; Charge-generation layers or charge-transporting layers; Additives therefor; Binders therefor
    • G03G5/08Photoconductive layers; Charge-generation layers or charge-transporting layers; Additives therefor; Binders therefor characterised by the photoconductive material being inorganic
    • G03G5/082Photoconductive layers; Charge-generation layers or charge-transporting layers; Additives therefor; Binders therefor characterised by the photoconductive material being inorganic and not being incorporated in a bonding material, e.g. vacuum deposited

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Physical Vapour Deposition (AREA)
  • Photoreceptors In Electrophotography (AREA)
JP48061799A 1973-06-04 1973-06-04 Expired JPS5234039B2 (US07922777-20110412-C00004.png)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP48061799A JPS5234039B2 (US07922777-20110412-C00004.png) 1973-06-04 1973-06-04
US459955A US3927638A (en) 1973-06-04 1974-04-11 Vacuum evaporation plating apparatus
DE19742426687 DE2426687A1 (de) 1973-06-04 1974-06-01 Verfahren und vorrichtung fuer vakuumverdampfungsplattierung
FR7419236A FR2232077B1 (US07922777-20110412-C00004.png) 1973-06-04 1974-06-04
NL7407523A NL7407523A (US07922777-20110412-C00004.png) 1973-06-04 1974-06-04

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP48061799A JPS5234039B2 (US07922777-20110412-C00004.png) 1973-06-04 1973-06-04

Publications (2)

Publication Number Publication Date
JPS5010288A JPS5010288A (US07922777-20110412-C00004.png) 1975-02-01
JPS5234039B2 true JPS5234039B2 (US07922777-20110412-C00004.png) 1977-09-01

Family

ID=13181497

Family Applications (1)

Application Number Title Priority Date Filing Date
JP48061799A Expired JPS5234039B2 (US07922777-20110412-C00004.png) 1973-06-04 1973-06-04

Country Status (5)

Country Link
US (1) US3927638A (US07922777-20110412-C00004.png)
JP (1) JPS5234039B2 (US07922777-20110412-C00004.png)
DE (1) DE2426687A1 (US07922777-20110412-C00004.png)
FR (1) FR2232077B1 (US07922777-20110412-C00004.png)
NL (1) NL7407523A (US07922777-20110412-C00004.png)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5943873A (ja) * 1982-09-04 1984-03-12 Konishiroku Photo Ind Co Ltd 蒸発材料収容器
JPS6286155A (ja) * 1985-10-11 1987-04-20 Mitsubishi Electric Corp 溶融物質の蒸気噴出装置
US5182567A (en) * 1990-10-12 1993-01-26 Custom Metallizing Services, Inc. Retrofittable vapor source for vacuum metallizing utilizing spatter reduction means
DE4104415C1 (US07922777-20110412-C00004.png) * 1991-02-14 1992-06-04 4P Verpackungen Ronsberg Gmbh, 8951 Ronsberg, De
JP3508484B2 (ja) * 1997-07-14 2004-03-22 松下電器産業株式会社 機能性薄膜の形成方法及び形成装置
JP4593008B2 (ja) * 2001-05-23 2010-12-08 キヤノンアネルバ株式会社 蒸着源並びにそれを用いた薄膜形成方法及び形成装置
JP2005029895A (ja) * 2003-07-04 2005-02-03 Agfa Gevaert Nv 蒸着装置
US7431807B2 (en) * 2005-01-07 2008-10-07 Universal Display Corporation Evaporation method using infrared guiding heater
EP1978563A3 (en) * 2007-03-23 2012-10-24 FUJIFILM Corporation Radiation detector and method for producing photoconductive layer for recording thereof
WO2012029260A1 (ja) * 2010-09-01 2012-03-08 シャープ株式会社 蒸着セル及びこれを備えた真空蒸着装置

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3057282A (en) * 1959-04-06 1962-10-09 Eastman Kodak Co Fluid treating device for sheet or strip materials
GB1172230A (en) * 1965-12-16 1969-11-26 Matsushita Electronics Corp A Method of Manufacturing Semiconductor Device
US3634647A (en) * 1967-07-14 1972-01-11 Ernest Brock Dale Jr Evaporation of multicomponent alloys
US3515852A (en) * 1967-08-10 1970-06-02 Sylvania Electric Prod Metal-evaporating source
US3655429A (en) * 1969-04-16 1972-04-11 Westinghouse Electric Corp Method of forming thin insulating films particularly for piezoelectric transducers

Also Published As

Publication number Publication date
FR2232077B1 (US07922777-20110412-C00004.png) 1977-03-11
NL7407523A (US07922777-20110412-C00004.png) 1974-12-06
FR2232077A1 (US07922777-20110412-C00004.png) 1974-12-27
JPS5010288A (US07922777-20110412-C00004.png) 1975-02-01
DE2426687A1 (de) 1974-12-19
US3927638A (en) 1975-12-23

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