JPS5233828U - - Google Patents

Info

Publication number
JPS5233828U
JPS5233828U JP11934075U JP11934075U JPS5233828U JP S5233828 U JPS5233828 U JP S5233828U JP 11934075 U JP11934075 U JP 11934075U JP 11934075 U JP11934075 U JP 11934075U JP S5233828 U JPS5233828 U JP S5233828U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11934075U
Other languages
Japanese (ja)
Other versions
JPS5414333Y2 (fi
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11934075U priority Critical patent/JPS5414333Y2/ja
Publication of JPS5233828U publication Critical patent/JPS5233828U/ja
Application granted granted Critical
Publication of JPS5414333Y2 publication Critical patent/JPS5414333Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Springs (AREA)
  • Mechanical Control Devices (AREA)
  • Lock And Its Accessories (AREA)
JP11934075U 1975-08-31 1975-08-31 Expired JPS5414333Y2 (fi)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11934075U JPS5414333Y2 (fi) 1975-08-31 1975-08-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11934075U JPS5414333Y2 (fi) 1975-08-31 1975-08-31

Publications (2)

Publication Number Publication Date
JPS5233828U true JPS5233828U (fi) 1977-03-10
JPS5414333Y2 JPS5414333Y2 (fi) 1979-06-14

Family

ID=28600151

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11934075U Expired JPS5414333Y2 (fi) 1975-08-31 1975-08-31

Country Status (1)

Country Link
JP (1) JPS5414333Y2 (fi)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5633846A (en) * 1979-08-29 1981-04-04 Fujitsu Ltd Detecting method for semiconductor substrate
JPS57108264A (en) * 1980-12-24 1982-07-06 Fujitsu Ltd Operating method for electrostatic adsorbing device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5633846A (en) * 1979-08-29 1981-04-04 Fujitsu Ltd Detecting method for semiconductor substrate
JPS57108264A (en) * 1980-12-24 1982-07-06 Fujitsu Ltd Operating method for electrostatic adsorbing device
JPS6311426B2 (fi) * 1980-12-24 1988-03-14 Fujitsu Ltd

Also Published As

Publication number Publication date
JPS5414333Y2 (fi) 1979-06-14

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