JPS5232828B2 - - Google Patents

Info

Publication number
JPS5232828B2
JPS5232828B2 JP11396372A JP11396372A JPS5232828B2 JP S5232828 B2 JPS5232828 B2 JP S5232828B2 JP 11396372 A JP11396372 A JP 11396372A JP 11396372 A JP11396372 A JP 11396372A JP S5232828 B2 JPS5232828 B2 JP S5232828B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP11396372A
Other languages
Japanese (ja)
Other versions
JPS4937563A (en:Method
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS4937563A publication Critical patent/JPS4937563A/ja
Publication of JPS5232828B2 publication Critical patent/JPS5232828B2/ja
Expired legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/02Elements
    • C30B29/06Silicon
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B28WORKING CEMENT, CLAY, OR STONE
    • B28DWORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0005Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by breaking, e.g. dicing
    • B28D5/0011Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by breaking, e.g. dicing with preliminary treatment, e.g. weakening by scoring
    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00Single-crystal growth by pulling from a melt, e.g. Czochralski method

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Silicon Compounds (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP11396372A 1972-06-29 1972-11-15 Expired JPS5232828B2 (en:Method)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US26729372A 1972-06-29 1972-06-29

Publications (2)

Publication Number Publication Date
JPS4937563A JPS4937563A (en:Method) 1974-04-08
JPS5232828B2 true JPS5232828B2 (en:Method) 1977-08-24

Family

ID=23018178

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11396372A Expired JPS5232828B2 (en:Method) 1972-06-29 1972-11-15

Country Status (4)

Country Link
JP (1) JPS5232828B2 (en:Method)
FR (1) FR2190730B3 (en:Method)
GB (1) GB1368224A (en:Method)
NL (1) NL7309113A (en:Method)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6874713B2 (en) 2002-08-22 2005-04-05 Dow Corning Corporation Method and apparatus for improving silicon processing efficiency

Also Published As

Publication number Publication date
NL7309113A (en:Method) 1974-01-02
FR2190730B3 (en:Method) 1976-06-18
GB1368224A (en) 1974-09-25
JPS4937563A (en:Method) 1974-04-08
FR2190730A1 (en:Method) 1974-02-01

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