JPS523196A - Method of manufacturing a thin film device - Google Patents

Method of manufacturing a thin film device

Info

Publication number
JPS523196A
JPS523196A JP7861875A JP7861875A JPS523196A JP S523196 A JPS523196 A JP S523196A JP 7861875 A JP7861875 A JP 7861875A JP 7861875 A JP7861875 A JP 7861875A JP S523196 A JPS523196 A JP S523196A
Authority
JP
Japan
Prior art keywords
thin film
film device
manufacturing
intrusion
recover
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7861875A
Other languages
Japanese (ja)
Inventor
Tsutomu Nomoto
Susumu Shibata
Keiji Murasugi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oki Electric Industry Co Ltd
Original Assignee
Oki Electric Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oki Electric Industry Co Ltd filed Critical Oki Electric Industry Co Ltd
Priority to JP7861875A priority Critical patent/JPS523196A/en
Publication of JPS523196A publication Critical patent/JPS523196A/en
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Apparatuses And Processes For Manufacturing Resistors (AREA)
  • Manufacturing Of Printed Wiring (AREA)
  • Parts Printed On Printed Circuit Boards (AREA)

Abstract

PURPOSE: To recover the initial value of the resistance value which has been decreased by the intrusion of adhesive metal into an anti-oxidation film layer in a thin film device.
COPYRIGHT: (C)1977,JPO&Japio
JP7861875A 1975-06-26 1975-06-26 Method of manufacturing a thin film device Pending JPS523196A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7861875A JPS523196A (en) 1975-06-26 1975-06-26 Method of manufacturing a thin film device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7861875A JPS523196A (en) 1975-06-26 1975-06-26 Method of manufacturing a thin film device

Publications (1)

Publication Number Publication Date
JPS523196A true JPS523196A (en) 1977-01-11

Family

ID=13666864

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7861875A Pending JPS523196A (en) 1975-06-26 1975-06-26 Method of manufacturing a thin film device

Country Status (1)

Country Link
JP (1) JPS523196A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52128382A (en) * 1976-04-20 1977-10-27 Olin Corp Method of preparing mercaptopyridine or its nnoxide
US7214295B2 (en) 2001-04-09 2007-05-08 Vishay Dale Electronics, Inc. Method for tantalum pentoxide moisture barrier in film resistors

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52128382A (en) * 1976-04-20 1977-10-27 Olin Corp Method of preparing mercaptopyridine or its nnoxide
JPS5539544B2 (en) * 1976-04-20 1980-10-13
US7214295B2 (en) 2001-04-09 2007-05-08 Vishay Dale Electronics, Inc. Method for tantalum pentoxide moisture barrier in film resistors

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