JPS5231662A - Cleavage method of crystal thin plate - Google Patents

Cleavage method of crystal thin plate

Info

Publication number
JPS5231662A
JPS5231662A JP7361476A JP7361476A JPS5231662A JP S5231662 A JPS5231662 A JP S5231662A JP 7361476 A JP7361476 A JP 7361476A JP 7361476 A JP7361476 A JP 7361476A JP S5231662 A JPS5231662 A JP S5231662A
Authority
JP
Japan
Prior art keywords
thin plate
crystal thin
cleavage method
cleavage
crystal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7361476A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5233469B2 (enExample
Inventor
Morio Inoue
Shoichi Watanabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electronics Corp filed Critical Matsushita Electronics Corp
Priority to JP7361476A priority Critical patent/JPS5231662A/ja
Publication of JPS5231662A publication Critical patent/JPS5231662A/ja
Publication of JPS5233469B2 publication Critical patent/JPS5233469B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Processing Of Stones Or Stones Resemblance Materials (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Dicing (AREA)
JP7361476A 1976-06-21 1976-06-21 Cleavage method of crystal thin plate Granted JPS5231662A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7361476A JPS5231662A (en) 1976-06-21 1976-06-21 Cleavage method of crystal thin plate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7361476A JPS5231662A (en) 1976-06-21 1976-06-21 Cleavage method of crystal thin plate

Publications (2)

Publication Number Publication Date
JPS5231662A true JPS5231662A (en) 1977-03-10
JPS5233469B2 JPS5233469B2 (enExample) 1977-08-29

Family

ID=13523377

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7361476A Granted JPS5231662A (en) 1976-06-21 1976-06-21 Cleavage method of crystal thin plate

Country Status (1)

Country Link
JP (1) JPS5231662A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103192460A (zh) * 2012-01-05 2013-07-10 威控自动化机械股份有限公司 切割装置及方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103192460A (zh) * 2012-01-05 2013-07-10 威控自动化机械股份有限公司 切割装置及方法

Also Published As

Publication number Publication date
JPS5233469B2 (enExample) 1977-08-29

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