JPS5230730A - Method of forming rectangular holes by etching - Google Patents

Method of forming rectangular holes by etching

Info

Publication number
JPS5230730A
JPS5230730A JP10693675A JP10693675A JPS5230730A JP S5230730 A JPS5230730 A JP S5230730A JP 10693675 A JP10693675 A JP 10693675A JP 10693675 A JP10693675 A JP 10693675A JP S5230730 A JPS5230730 A JP S5230730A
Authority
JP
Japan
Prior art keywords
etching
rectangular holes
forming rectangular
forming
holes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10693675A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5415259B2 (ref
Inventor
Etsuzou Terajima
Hideji Shioi
Jiyunichi Yamada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP10693675A priority Critical patent/JPS5230730A/ja
Publication of JPS5230730A publication Critical patent/JPS5230730A/ja
Publication of JPS5415259B2 publication Critical patent/JPS5415259B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
JP10693675A 1975-09-05 1975-09-05 Method of forming rectangular holes by etching Granted JPS5230730A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10693675A JPS5230730A (en) 1975-09-05 1975-09-05 Method of forming rectangular holes by etching

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10693675A JPS5230730A (en) 1975-09-05 1975-09-05 Method of forming rectangular holes by etching

Publications (2)

Publication Number Publication Date
JPS5230730A true JPS5230730A (en) 1977-03-08
JPS5415259B2 JPS5415259B2 (ref) 1979-06-13

Family

ID=14446266

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10693675A Granted JPS5230730A (en) 1975-09-05 1975-09-05 Method of forming rectangular holes by etching

Country Status (1)

Country Link
JP (1) JPS5230730A (ref)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49129932A (ref) * 1973-04-17 1974-12-12

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49129932A (ref) * 1973-04-17 1974-12-12

Also Published As

Publication number Publication date
JPS5415259B2 (ref) 1979-06-13

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