JPS5230453A - Pattern matching device - Google Patents
Pattern matching deviceInfo
- Publication number
- JPS5230453A JPS5230453A JP10653775A JP10653775A JPS5230453A JP S5230453 A JPS5230453 A JP S5230453A JP 10653775 A JP10653775 A JP 10653775A JP 10653775 A JP10653775 A JP 10653775A JP S5230453 A JPS5230453 A JP S5230453A
- Authority
- JP
- Japan
- Prior art keywords
- pattern matching
- matching device
- optical system
- observing
- mirror
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Diffracting Gratings Or Hologram Optical Elements (AREA)
- Microscoopes, Condenser (AREA)
Abstract
PURPOSE: In an optical system for generating a number of images, it is intended to highly accurately effect pattern alignment by permitting the light diffracted in a lens hologram array to be bent by means of a half mirror for image formation and observing the surface of the formed image through said mirror by means of an observing optical system.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10653775A JPS5230453A (en) | 1975-09-04 | 1975-09-04 | Pattern matching device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10653775A JPS5230453A (en) | 1975-09-04 | 1975-09-04 | Pattern matching device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5230453A true JPS5230453A (en) | 1977-03-08 |
Family
ID=14436126
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10653775A Pending JPS5230453A (en) | 1975-09-04 | 1975-09-04 | Pattern matching device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5230453A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5699193A (en) * | 1995-07-10 | 1997-12-16 | Finetech Gesellschaft Fur Electronik Technologie Mbh | Apparatus and method for the accurate positioning of components for flip-chip mounting |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3658403A (en) * | 1968-06-20 | 1972-04-25 | Rca Corp | High fidelity readout of a hologram performing the function of a complex wave modifying structure |
-
1975
- 1975-09-04 JP JP10653775A patent/JPS5230453A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3658403A (en) * | 1968-06-20 | 1972-04-25 | Rca Corp | High fidelity readout of a hologram performing the function of a complex wave modifying structure |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5699193A (en) * | 1995-07-10 | 1997-12-16 | Finetech Gesellschaft Fur Electronik Technologie Mbh | Apparatus and method for the accurate positioning of components for flip-chip mounting |
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