JPS5230242B2 - - Google Patents

Info

Publication number
JPS5230242B2
JPS5230242B2 JP13062973A JP13062973A JPS5230242B2 JP S5230242 B2 JPS5230242 B2 JP S5230242B2 JP 13062973 A JP13062973 A JP 13062973A JP 13062973 A JP13062973 A JP 13062973A JP S5230242 B2 JPS5230242 B2 JP S5230242B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP13062973A
Other languages
Japanese (ja)
Other versions
JPS4982504A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE2257667A external-priority patent/DE2257667C3/de
Application filed filed Critical
Publication of JPS4982504A publication Critical patent/JPS4982504A/ja
Publication of JPS5230242B2 publication Critical patent/JPS5230242B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP13062973A 1972-11-24 1973-11-20 Expired JPS5230242B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2257667A DE2257667C3 (de) 1971-11-30 1972-11-24 Düse zum Einblasen von heißen Gasen in einen Schachtofen

Publications (2)

Publication Number Publication Date
JPS4982504A JPS4982504A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1974-08-08
JPS5230242B2 true JPS5230242B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1977-08-06

Family

ID=5862625

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13062973A Expired JPS5230242B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-11-24 1973-11-20

Country Status (1)

Country Link
JP (1) JPS5230242B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Also Published As

Publication number Publication date
JPS4982504A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1974-08-08

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