JPS5228634B2 - - Google Patents

Info

Publication number
JPS5228634B2
JPS5228634B2 JP581973A JP581973A JPS5228634B2 JP S5228634 B2 JPS5228634 B2 JP S5228634B2 JP 581973 A JP581973 A JP 581973A JP 581973 A JP581973 A JP 581973A JP S5228634 B2 JPS5228634 B2 JP S5228634B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP581973A
Other languages
Japanese (ja)
Other versions
JPS504977A (enrdf_load_html_response
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS504977A publication Critical patent/JPS504977A/ja
Publication of JPS5228634B2 publication Critical patent/JPS5228634B2/ja
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02367—Substrates
    • H01L21/0237—Materials
    • H01L21/02373—Group 14 semiconducting materials
    • H01L21/02381—Silicon, silicon germanium, germanium
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02367—Substrates
    • H01L21/0237—Materials
    • H01L21/0242—Crystalline insulating materials
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02436—Intermediate layers between substrates and deposited layers
    • H01L21/02439—Materials
    • H01L21/02455—Group 13/15 materials
    • H01L21/02463—Arsenides
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02436—Intermediate layers between substrates and deposited layers
    • H01L21/02439—Materials
    • H01L21/02455—Group 13/15 materials
    • H01L21/02466—Antimonides
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02436—Intermediate layers between substrates and deposited layers
    • H01L21/02439—Materials
    • H01L21/02469—Group 12/16 materials
    • H01L21/02477—Selenides
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02518—Deposited layers
    • H01L21/02521—Materials
    • H01L21/02538—Group 13/15 materials
    • H01L21/02546—Arsenides
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02518—Deposited layers
    • H01L21/02521—Materials
    • H01L21/02538—Group 13/15 materials
    • H01L21/02549—Antimonides
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02612—Formation types
    • H01L21/02617—Deposition types
    • H01L21/0262—Reduction or decomposition of gaseous compounds, e.g. CVD

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Bipolar Transistors (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Led Devices (AREA)
  • Light Receiving Elements (AREA)
  • Recrystallisation Techniques (AREA)
JP581973A 1972-01-10 1973-01-10 Expired JPS5228634B2 (enrdf_load_html_response)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US21637672A 1972-01-10 1972-01-10

Publications (2)

Publication Number Publication Date
JPS504977A JPS504977A (enrdf_load_html_response) 1975-01-20
JPS5228634B2 true JPS5228634B2 (enrdf_load_html_response) 1977-07-27

Family

ID=22806816

Family Applications (1)

Application Number Title Priority Date Filing Date
JP581973A Expired JPS5228634B2 (enrdf_load_html_response) 1972-01-10 1973-01-10

Country Status (10)

Country Link
JP (1) JPS5228634B2 (enrdf_load_html_response)
AU (1) AU466927B2 (enrdf_load_html_response)
BE (1) BE793800A (enrdf_load_html_response)
CA (1) CA973976A (enrdf_load_html_response)
DE (1) DE2300921A1 (enrdf_load_html_response)
FR (1) FR2167831B1 (enrdf_load_html_response)
GB (1) GB1417484A (enrdf_load_html_response)
IT (1) IT978097B (enrdf_load_html_response)
NL (1) NL7300350A (enrdf_load_html_response)
SE (1) SE387473B (enrdf_load_html_response)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5264272A (en) * 1975-11-22 1977-05-27 Fujitsu Ltd Semiconductor crystal
CA1256590A (en) * 1985-03-15 1989-06-27 Yuichi Matsui Compound semiconductor device with layers having different lattice constants
GB2215514A (en) * 1988-03-04 1989-09-20 Plessey Co Plc Terminating dislocations in semiconductor epitaxial layers
JP2588280B2 (ja) * 1989-07-10 1997-03-05 シャープ株式会社 化合物半導体発光素子

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3493811A (en) * 1966-06-22 1970-02-03 Hewlett Packard Co Epitaxial semiconductor material on dissimilar substrate and method for producing the same

Also Published As

Publication number Publication date
NL7300350A (enrdf_load_html_response) 1973-07-12
FR2167831A1 (enrdf_load_html_response) 1973-08-24
DE2300921A1 (de) 1973-07-19
SE387473B (sv) 1976-09-06
AU5094273A (en) 1974-07-11
GB1417484A (en) 1975-12-10
IT978097B (it) 1974-09-20
BE793800A (fr) 1973-05-02
JPS504977A (enrdf_load_html_response) 1975-01-20
AU466927B2 (en) 1975-11-13
CA973976A (en) 1975-09-02
FR2167831B1 (enrdf_load_html_response) 1977-12-30

Similar Documents

Publication Publication Date Title
JPS4987904A (enrdf_load_html_response)
FR2198483A5 (enrdf_load_html_response)
FR2192676A5 (enrdf_load_html_response)
JPS5411043B2 (enrdf_load_html_response)
FR2167831B1 (enrdf_load_html_response)
JPS4949199A (enrdf_load_html_response)
FR2181196A5 (enrdf_load_html_response)
JPS5131787Y2 (enrdf_load_html_response)
JPS4957912U (enrdf_load_html_response)
JPS4877351A (enrdf_load_html_response)
JPS498927A (enrdf_load_html_response)
JPS511828Y1 (enrdf_load_html_response)
FR2194628A1 (enrdf_load_html_response)
JPS4893469A (enrdf_load_html_response)
JPS4951834U (enrdf_load_html_response)
JPS4923525U (enrdf_load_html_response)
JPS4983242A (enrdf_load_html_response)
JPS4982456A (enrdf_load_html_response)
JPS4977717U (enrdf_load_html_response)
DE2202880A1 (enrdf_load_html_response)
JPS4949768A (enrdf_load_html_response)
CH583168A5 (enrdf_load_html_response)
CH569186A5 (enrdf_load_html_response)
CH569293A5 (enrdf_load_html_response)
CH575335A5 (enrdf_load_html_response)