JPS5228239A - Testing system for unit of semiconductor integrated circuit - Google Patents

Testing system for unit of semiconductor integrated circuit

Info

Publication number
JPS5228239A
JPS5228239A JP50103982A JP10398275A JPS5228239A JP S5228239 A JPS5228239 A JP S5228239A JP 50103982 A JP50103982 A JP 50103982A JP 10398275 A JP10398275 A JP 10398275A JP S5228239 A JPS5228239 A JP S5228239A
Authority
JP
Japan
Prior art keywords
unit
integrated circuit
semiconductor integrated
testing system
frequency
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP50103982A
Other languages
Japanese (ja)
Inventor
Yoichi Asano
Eiji Wada
Yoshikazu Suzumura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP50103982A priority Critical patent/JPS5228239A/en
Publication of JPS5228239A publication Critical patent/JPS5228239A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: Frequency of built-in clock generating circuit is measured, frequency of cutside oscillating circuit is decided and common clock signal is sent to equipment to be tested and testing machine.
COPYRIGHT: (C)1977,JPO&Japio
JP50103982A 1975-08-29 1975-08-29 Testing system for unit of semiconductor integrated circuit Pending JPS5228239A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50103982A JPS5228239A (en) 1975-08-29 1975-08-29 Testing system for unit of semiconductor integrated circuit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50103982A JPS5228239A (en) 1975-08-29 1975-08-29 Testing system for unit of semiconductor integrated circuit

Publications (1)

Publication Number Publication Date
JPS5228239A true JPS5228239A (en) 1977-03-03

Family

ID=14368509

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50103982A Pending JPS5228239A (en) 1975-08-29 1975-08-29 Testing system for unit of semiconductor integrated circuit

Country Status (1)

Country Link
JP (1) JPS5228239A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4967088A (en) * 1987-06-02 1990-10-30 Oesterreichische Investitionskredit Aktiengesellschaft Method and apparatus for image alignment in ion lithography

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4967088A (en) * 1987-06-02 1990-10-30 Oesterreichische Investitionskredit Aktiengesellschaft Method and apparatus for image alignment in ion lithography

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