JPS522783A - Defect detecting device - Google Patents

Defect detecting device

Info

Publication number
JPS522783A
JPS522783A JP7925375A JP7925375A JPS522783A JP S522783 A JPS522783 A JP S522783A JP 7925375 A JP7925375 A JP 7925375A JP 7925375 A JP7925375 A JP 7925375A JP S522783 A JPS522783 A JP S522783A
Authority
JP
Japan
Prior art keywords
detecting device
defect detecting
optical system
defect
discregard
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7925375A
Other languages
Japanese (ja)
Other versions
JPS5949537B2 (en
Inventor
Tatsuo Nakama
Shigeki Matsuo
Kenji Tanaka
Masayoshi Yamane
Katsumi Hirayama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yaskawa Electric Corp
Toray Industries Inc
Original Assignee
Toray Industries Inc
Yaskawa Electric Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toray Industries Inc, Yaskawa Electric Manufacturing Co Ltd filed Critical Toray Industries Inc
Priority to JP7925375A priority Critical patent/JPS5949537B2/en
Publication of JPS522783A publication Critical patent/JPS522783A/en
Publication of JPS5949537B2 publication Critical patent/JPS5949537B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Mechanical Optical Scanning Systems (AREA)

Abstract

PURPOSE:To eliminate the discregard of defects or duplicate detection of the some defect, by combining an optical system to compensate the disarray in the scanning trail with the seaming optical system using a conical mirror.
JP7925375A 1975-06-25 1975-06-25 Defect detection device Expired JPS5949537B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7925375A JPS5949537B2 (en) 1975-06-25 1975-06-25 Defect detection device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7925375A JPS5949537B2 (en) 1975-06-25 1975-06-25 Defect detection device

Publications (2)

Publication Number Publication Date
JPS522783A true JPS522783A (en) 1977-01-10
JPS5949537B2 JPS5949537B2 (en) 1984-12-03

Family

ID=13684679

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7925375A Expired JPS5949537B2 (en) 1975-06-25 1975-06-25 Defect detection device

Country Status (1)

Country Link
JP (1) JPS5949537B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60257417A (en) * 1984-06-04 1985-12-19 Fuji Xerox Co Ltd Optical beam scanner
US4984231A (en) * 1987-01-23 1991-01-08 Hitachi, Ltd. Optical information phase change recording medium having double protective layer

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60257417A (en) * 1984-06-04 1985-12-19 Fuji Xerox Co Ltd Optical beam scanner
US4984231A (en) * 1987-01-23 1991-01-08 Hitachi, Ltd. Optical information phase change recording medium having double protective layer

Also Published As

Publication number Publication date
JPS5949537B2 (en) 1984-12-03

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