JPS5227266A - Wafer support - Google Patents
Wafer supportInfo
- Publication number
- JPS5227266A JPS5227266A JP50102197A JP10219775A JPS5227266A JP S5227266 A JPS5227266 A JP S5227266A JP 50102197 A JP50102197 A JP 50102197A JP 10219775 A JP10219775 A JP 10219775A JP S5227266 A JPS5227266 A JP S5227266A
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- wafer support
- damaging
- periphery
- stand
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE:To easily remove a wafer attached to a wafer stand by inducting air through the periphery of the wafer without damaging the wafer.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50102197A JPS5227266A (en) | 1975-08-25 | 1975-08-25 | Wafer support |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50102197A JPS5227266A (en) | 1975-08-25 | 1975-08-25 | Wafer support |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5227266A true JPS5227266A (en) | 1977-03-01 |
Family
ID=14320923
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP50102197A Pending JPS5227266A (en) | 1975-08-25 | 1975-08-25 | Wafer support |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5227266A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS605539A (en) * | 1983-06-23 | 1985-01-12 | Fujitsu Ltd | Electrostatic absorber |
US5442828A (en) * | 1992-11-30 | 1995-08-22 | Ontrak Systems, Inc. | Double-sided wafer scrubber with a wet submersing silicon wafer indexer |
JP2021000712A (en) * | 2019-06-24 | 2021-01-07 | 株式会社ディスコ | Holding device |
-
1975
- 1975-08-25 JP JP50102197A patent/JPS5227266A/en active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS605539A (en) * | 1983-06-23 | 1985-01-12 | Fujitsu Ltd | Electrostatic absorber |
JPS6325706B2 (en) * | 1983-06-23 | 1988-05-26 | Fujitsu Ltd | |
US5442828A (en) * | 1992-11-30 | 1995-08-22 | Ontrak Systems, Inc. | Double-sided wafer scrubber with a wet submersing silicon wafer indexer |
JP2021000712A (en) * | 2019-06-24 | 2021-01-07 | 株式会社ディスコ | Holding device |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
A761 | Written withdrawal of application |
Effective date: 20040224 Free format text: JAPANESE INTERMEDIATE CODE: A761 |