JPS51111746A - Clean bench - Google Patents

Clean bench

Info

Publication number
JPS51111746A
JPS51111746A JP50037098A JP3709875A JPS51111746A JP S51111746 A JPS51111746 A JP S51111746A JP 50037098 A JP50037098 A JP 50037098A JP 3709875 A JP3709875 A JP 3709875A JP S51111746 A JPS51111746 A JP S51111746A
Authority
JP
Japan
Prior art keywords
clean bench
bench
clean
dry air
obtain dry
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP50037098A
Other languages
Japanese (ja)
Inventor
Noboru Higashiyama
Kenichi Nishi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP50037098A priority Critical patent/JPS51111746A/en
Publication of JPS51111746A publication Critical patent/JPS51111746A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To obtain dry air from a clean bench.
JP50037098A 1975-03-27 1975-03-27 Clean bench Pending JPS51111746A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50037098A JPS51111746A (en) 1975-03-27 1975-03-27 Clean bench

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50037098A JPS51111746A (en) 1975-03-27 1975-03-27 Clean bench

Publications (1)

Publication Number Publication Date
JPS51111746A true JPS51111746A (en) 1976-10-02

Family

ID=12488093

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50037098A Pending JPS51111746A (en) 1975-03-27 1975-03-27 Clean bench

Country Status (1)

Country Link
JP (1) JPS51111746A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54142855A (en) * 1978-04-28 1979-11-07 Hitachi Plant Eng & Constr Co Ltd Air conditioning system

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4911756A (en) * 1972-05-16 1974-02-01

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4911756A (en) * 1972-05-16 1974-02-01

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54142855A (en) * 1978-04-28 1979-11-07 Hitachi Plant Eng & Constr Co Ltd Air conditioning system
JPS5819007B2 (en) * 1978-04-28 1983-04-15 日立プラント建設株式会社 Outside air intake air conditioning method

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