JPS5227024A - Coil for vaporisation - Google Patents

Coil for vaporisation

Info

Publication number
JPS5227024A
JPS5227024A JP10308675A JP10308675A JPS5227024A JP S5227024 A JPS5227024 A JP S5227024A JP 10308675 A JP10308675 A JP 10308675A JP 10308675 A JP10308675 A JP 10308675A JP S5227024 A JPS5227024 A JP S5227024A
Authority
JP
Japan
Prior art keywords
vaporisation
coil
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10308675A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5415257B2 (ro
Inventor
Kunihiko Masuyama
Kiyouji Ezawa
Akio Kotabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP10308675A priority Critical patent/JPS5227024A/ja
Publication of JPS5227024A publication Critical patent/JPS5227024A/ja
Publication of JPS5415257B2 publication Critical patent/JPS5415257B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Heat Treatment Of Nonferrous Metals Or Alloys (AREA)
  • Physical Vapour Deposition (AREA)
JP10308675A 1975-08-27 1975-08-27 Coil for vaporisation Granted JPS5227024A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10308675A JPS5227024A (en) 1975-08-27 1975-08-27 Coil for vaporisation

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10308675A JPS5227024A (en) 1975-08-27 1975-08-27 Coil for vaporisation

Publications (2)

Publication Number Publication Date
JPS5227024A true JPS5227024A (en) 1977-03-01
JPS5415257B2 JPS5415257B2 (ro) 1979-06-13

Family

ID=14344812

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10308675A Granted JPS5227024A (en) 1975-08-27 1975-08-27 Coil for vaporisation

Country Status (1)

Country Link
JP (1) JPS5227024A (ro)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0295016A (ja) * 1988-09-30 1990-04-05 Ando Electric Co Ltd Ｐｌｌ回路
JPH0284441U (ro) * 1988-12-19 1990-06-29
CN105112755A (zh) * 2015-09-21 2015-12-02 上海西普瀚芯电子科技有限公司 一种高温钼合金及其制备方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0295016A (ja) * 1988-09-30 1990-04-05 Ando Electric Co Ltd Ｐｌｌ回路
JPH0284441U (ro) * 1988-12-19 1990-06-29
CN105112755A (zh) * 2015-09-21 2015-12-02 上海西普瀚芯电子科技有限公司 一种高温钼合金及其制备方法

Also Published As

Publication number Publication date
JPS5415257B2 (ro) 1979-06-13

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