JPS5226325A - Production method of filter for exposure - Google Patents

Production method of filter for exposure

Info

Publication number
JPS5226325A
JPS5226325A JP10217475A JP10217475A JPS5226325A JP S5226325 A JPS5226325 A JP S5226325A JP 10217475 A JP10217475 A JP 10217475A JP 10217475 A JP10217475 A JP 10217475A JP S5226325 A JPS5226325 A JP S5226325A
Authority
JP
Japan
Prior art keywords
exposure
filter
production method
production
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10217475A
Other languages
Japanese (ja)
Inventor
Shiyoukou Nishizawa
Toshio Ueda
Hiroshi Yokomizo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP10217475A priority Critical patent/JPS5226325A/en
Publication of JPS5226325A publication Critical patent/JPS5226325A/en
Pending legal-status Critical Current

Links

Landscapes

  • Optical Filters (AREA)
  • Surface Treatment Of Glass (AREA)
  • Physical Vapour Deposition (AREA)
JP10217475A 1975-08-25 1975-08-25 Production method of filter for exposure Pending JPS5226325A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10217475A JPS5226325A (en) 1975-08-25 1975-08-25 Production method of filter for exposure

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10217475A JPS5226325A (en) 1975-08-25 1975-08-25 Production method of filter for exposure

Publications (1)

Publication Number Publication Date
JPS5226325A true JPS5226325A (en) 1977-02-26

Family

ID=14320318

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10217475A Pending JPS5226325A (en) 1975-08-25 1975-08-25 Production method of filter for exposure

Country Status (1)

Country Link
JP (1) JPS5226325A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0373705U (en) * 1989-11-20 1991-07-24

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0373705U (en) * 1989-11-20 1991-07-24

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