JPS5226173A - Manufacturing method of disc wafer casing jig - Google Patents
Manufacturing method of disc wafer casing jigInfo
- Publication number
- JPS5226173A JPS5226173A JP10124175A JP10124175A JPS5226173A JP S5226173 A JPS5226173 A JP S5226173A JP 10124175 A JP10124175 A JP 10124175A JP 10124175 A JP10124175 A JP 10124175A JP S5226173 A JPS5226173 A JP S5226173A
- Authority
- JP
- Japan
- Prior art keywords
- manufacturing
- disc wafer
- casing jig
- jig
- wafer casing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10124175A JPS5226173A (en) | 1975-08-22 | 1975-08-22 | Manufacturing method of disc wafer casing jig |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10124175A JPS5226173A (en) | 1975-08-22 | 1975-08-22 | Manufacturing method of disc wafer casing jig |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5226173A true JPS5226173A (en) | 1977-02-26 |
JPS5346670B2 JPS5346670B2 (fi) | 1978-12-15 |
Family
ID=14295396
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10124175A Granted JPS5226173A (en) | 1975-08-22 | 1975-08-22 | Manufacturing method of disc wafer casing jig |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5226173A (fi) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62254422A (ja) * | 1986-04-28 | 1987-11-06 | Fukui Shinetsu Sekiei:Kk | ウエハ支持ボ−ト |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5056148A (fi) * | 1973-09-14 | 1975-05-16 | ||
JPS5062579A (fi) * | 1973-10-02 | 1975-05-28 |
-
1975
- 1975-08-22 JP JP10124175A patent/JPS5226173A/ja active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5056148A (fi) * | 1973-09-14 | 1975-05-16 | ||
JPS5062579A (fi) * | 1973-10-02 | 1975-05-28 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62254422A (ja) * | 1986-04-28 | 1987-11-06 | Fukui Shinetsu Sekiei:Kk | ウエハ支持ボ−ト |
Also Published As
Publication number | Publication date |
---|---|
JPS5346670B2 (fi) | 1978-12-15 |
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