JPS5225295B2 - - Google Patents
Info
- Publication number
- JPS5225295B2 JPS5225295B2 JP5420073A JP5420073A JPS5225295B2 JP S5225295 B2 JPS5225295 B2 JP S5225295B2 JP 5420073 A JP5420073 A JP 5420073A JP 5420073 A JP5420073 A JP 5420073A JP S5225295 B2 JPS5225295 B2 JP S5225295B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/06—Silicon
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
- C30B25/02—Epitaxial-layer growth
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Chemical Vapour Deposition (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| NL7206877A NL7206877A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1972-05-20 | 1972-05-20 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4943572A JPS4943572A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1974-04-24 |
| JPS5225295B2 true JPS5225295B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1977-07-06 |
Family
ID=19816097
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5420073A Expired JPS5225295B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1972-05-20 | 1973-05-17 |
Country Status (7)
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3166609D1 (en) * | 1980-07-28 | 1984-11-15 | Monsanto Co | Improved method for producing semiconductor grade silicon |
| JPS6169116A (ja) * | 1984-09-13 | 1986-04-09 | Toshiba Ceramics Co Ltd | シリコンウエハ−の連続ｃｖｄコ−テイング用サセプター |
| JP3725598B2 (ja) * | 1996-01-12 | 2005-12-14 | 東芝セラミックス株式会社 | エピタキシャルウェハの製造方法 |
| JP2006070342A (ja) * | 2004-09-03 | 2006-03-16 | Sumitomo Electric Ind Ltd | 気相成膜装置、サセプタおよび気相成膜方法 |
| JP6333646B2 (ja) | 2014-07-08 | 2018-05-30 | ビーエーエスエフ コーティングス ゲゼルシャフト ミット ベシュレンクテル ハフツングＢＡＳＦ Ｃｏａｔｉｎｇｓ ＧｍｂＨ | 二液型塗料組成物及びそれを用いた複層塗膜形成方法 |
-
1972
- 1972-05-20 NL NL7206877A patent/NL7206877A/xx unknown
-
1973
- 1973-05-12 DE DE19732324127 patent/DE2324127A1/de not_active Withdrawn
- 1973-05-15 CA CA171,410A patent/CA990626A/en not_active Expired
- 1973-05-15 FR FR7317471A patent/FR2185445B1/fr not_active Expired
- 1973-05-17 JP JP5420073A patent/JPS5225295B2/ja not_active Expired
- 1973-05-17 GB GB2355473A patent/GB1406760A/en not_active Expired
- 1973-05-17 IT IT6843873A patent/IT985922B/it active
Also Published As
| Publication number | Publication date |
|---|---|
| FR2185445B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1976-06-11 |
| NL7206877A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1973-11-22 |
| DE2324127A1 (de) | 1973-12-06 |
| GB1406760A (en) | 1975-09-17 |
| IT985922B (it) | 1974-12-30 |
| FR2185445A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1974-01-04 |
| CA990626A (en) | 1976-06-08 |
| JPS4943572A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1974-04-24 |