JPS4954234A - - Google Patents

Info

Publication number
JPS4954234A
JPS4954234A JP9773572A JP9773572A JPS4954234A JP S4954234 A JPS4954234 A JP S4954234A JP 9773572 A JP9773572 A JP 9773572A JP 9773572 A JP9773572 A JP 9773572A JP S4954234 A JPS4954234 A JP S4954234A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9773572A
Other languages
Japanese (ja)
Other versions
JPS5413856B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9773572A priority Critical patent/JPS5413856B2/ja
Publication of JPS4954234A publication Critical patent/JPS4954234A/ja
Publication of JPS5413856B2 publication Critical patent/JPS5413856B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Coating By Spraying Or Casting (AREA)
JP9773572A 1972-09-29 1972-09-29 Expired JPS5413856B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9773572A JPS5413856B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-09-29 1972-09-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9773572A JPS5413856B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-09-29 1972-09-29

Publications (2)

Publication Number Publication Date
JPS4954234A true JPS4954234A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1974-05-27
JPS5413856B2 JPS5413856B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1979-06-02

Family

ID=14200139

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9773572A Expired JPS5413856B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-09-29 1972-09-29

Country Status (1)

Country Link
JP (1) JPS5413856B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008138232A (ja) * 2006-11-30 2008-06-19 Mitsubishi Materials Corp 高Ga含有Cu−Ga二元系合金スパッタリングターゲットおよびその製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008138232A (ja) * 2006-11-30 2008-06-19 Mitsubishi Materials Corp 高Ga含有Cu−Ga二元系合金スパッタリングターゲットおよびその製造方法

Also Published As

Publication number Publication date
JPS5413856B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1979-06-02

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