JPS4954234A - - Google Patents
Info
- Publication number
- JPS4954234A JPS4954234A JP9773572A JP9773572A JPS4954234A JP S4954234 A JPS4954234 A JP S4954234A JP 9773572 A JP9773572 A JP 9773572A JP 9773572 A JP9773572 A JP 9773572A JP S4954234 A JPS4954234 A JP S4954234A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9773572A JPS5413856B2 (ja) | 1972-09-29 | 1972-09-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9773572A JPS5413856B2 (ja) | 1972-09-29 | 1972-09-29 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4954234A true JPS4954234A (ja) | 1974-05-27 |
| JPS5413856B2 JPS5413856B2 (ja) | 1979-06-02 |
Family
ID=14200139
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9773572A Expired JPS5413856B2 (ja) | 1972-09-29 | 1972-09-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5413856B2 (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008138232A (ja) * | 2006-11-30 | 2008-06-19 | Mitsubishi Materials Corp | 高Ｇａ含有Ｃｕ−Ｇａ二元系合金スパッタリングターゲットおよびその製造方法 |
-
1972
- 1972-09-29 JP JP9773572A patent/JPS5413856B2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008138232A (ja) * | 2006-11-30 | 2008-06-19 | Mitsubishi Materials Corp | 高Ｇａ含有Ｃｕ−Ｇａ二元系合金スパッタリングターゲットおよびその製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5413856B2 (ja) | 1979-06-02 |