JPS5225290B2 - - Google Patents
Info
- Publication number
- JPS5225290B2 JPS5225290B2 JP6196073A JP6196073A JPS5225290B2 JP S5225290 B2 JPS5225290 B2 JP S5225290B2 JP 6196073 A JP6196073 A JP 6196073A JP 6196073 A JP6196073 A JP 6196073A JP S5225290 B2 JPS5225290 B2 JP S5225290B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6196073A JPS5225290B2 (ko) | 1973-06-04 | 1973-06-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6196073A JPS5225290B2 (ko) | 1973-06-04 | 1973-06-04 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5011759A JPS5011759A (ko) | 1975-02-06 |
| JPS5225290B2 true JPS5225290B2 (ko) | 1977-07-06 |
Family
ID=13186248
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6196073A Expired JPS5225290B2 (ko) | 1973-06-04 | 1973-06-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5225290B2 (ko) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101318592B1 (ko) * | 2009-11-26 | 2013-10-15 | 가부시키가이샤 히다치 하이테크놀로지즈 | 주사 전자 현미경 |
| JP6074760B2 (ja) * | 2012-09-13 | 2017-02-08 | 国立大学法人北海道大学 | 電子線照射装置 |
-
1973
- 1973-06-04 JP JP6196073A patent/JPS5225290B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5011759A (ko) | 1975-02-06 |