JPS5224705A - Highly precise metal mask - Google Patents

Highly precise metal mask

Info

Publication number
JPS5224705A
JPS5224705A JP5976475A JP5976475A JPS5224705A JP S5224705 A JPS5224705 A JP S5224705A JP 5976475 A JP5976475 A JP 5976475A JP 5976475 A JP5976475 A JP 5976475A JP S5224705 A JPS5224705 A JP S5224705A
Authority
JP
Japan
Prior art keywords
metal mask
highly precise
precise metal
highly
mask
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5976475A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5427763B2 (enrdf_load_stackoverflow
Inventor
Takashi Kuroki
Mitsuo Nakatani
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP5976475A priority Critical patent/JPS5224705A/ja
Publication of JPS5224705A publication Critical patent/JPS5224705A/ja
Publication of JPS5427763B2 publication Critical patent/JPS5427763B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Printing Plates And Materials Therefor (AREA)
JP5976475A 1975-05-21 1975-05-21 Highly precise metal mask Granted JPS5224705A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5976475A JPS5224705A (en) 1975-05-21 1975-05-21 Highly precise metal mask

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5976475A JPS5224705A (en) 1975-05-21 1975-05-21 Highly precise metal mask

Publications (2)

Publication Number Publication Date
JPS5224705A true JPS5224705A (en) 1977-02-24
JPS5427763B2 JPS5427763B2 (enrdf_load_stackoverflow) 1979-09-12

Family

ID=13122654

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5976475A Granted JPS5224705A (en) 1975-05-21 1975-05-21 Highly precise metal mask

Country Status (1)

Country Link
JP (1) JPS5224705A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53113602A (en) * 1977-03-15 1978-10-04 Fujitsu Ltd Method of engraving metal mask
JPS54126704U (enrdf_load_stackoverflow) * 1978-02-22 1979-09-04
JPS554481U (enrdf_load_stackoverflow) * 1978-06-22 1980-01-12

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53113602A (en) * 1977-03-15 1978-10-04 Fujitsu Ltd Method of engraving metal mask
JPS54126704U (enrdf_load_stackoverflow) * 1978-02-22 1979-09-04
JPS554481U (enrdf_load_stackoverflow) * 1978-06-22 1980-01-12

Also Published As

Publication number Publication date
JPS5427763B2 (enrdf_load_stackoverflow) 1979-09-12

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