JPS5224578A - Surface defect detector - Google Patents

Surface defect detector

Info

Publication number
JPS5224578A
JPS5224578A JP10021075A JP10021075A JPS5224578A JP S5224578 A JPS5224578 A JP S5224578A JP 10021075 A JP10021075 A JP 10021075A JP 10021075 A JP10021075 A JP 10021075A JP S5224578 A JPS5224578 A JP S5224578A
Authority
JP
Japan
Prior art keywords
surface defect
defect detector
detector
impairing
reliability
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10021075A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5525788B2 (enExample
Inventor
Tomohiro Kuyu
Nobuyuki Akiyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP10021075A priority Critical patent/JPS5224578A/ja
Priority to US05/715,218 priority patent/US4095905A/en
Priority to GB34646/76A priority patent/GB1548973A/en
Priority to DE2637375A priority patent/DE2637375C3/de
Publication of JPS5224578A publication Critical patent/JPS5224578A/ja
Publication of JPS5525788B2 publication Critical patent/JPS5525788B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/8901—Optical details; Scanning details

Landscapes

  • Engineering & Computer Science (AREA)
  • Textile Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP10021075A 1975-08-20 1975-08-20 Surface defect detector Granted JPS5224578A (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP10021075A JPS5224578A (en) 1975-08-20 1975-08-20 Surface defect detector
US05/715,218 US4095905A (en) 1975-08-20 1976-08-17 Surface-defect detecting device
GB34646/76A GB1548973A (en) 1975-08-20 1976-08-19 Surface defect detecting device
DE2637375A DE2637375C3 (de) 1975-08-20 1976-08-19 Optisches Oberflächenprüfgerät

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10021075A JPS5224578A (en) 1975-08-20 1975-08-20 Surface defect detector

Publications (2)

Publication Number Publication Date
JPS5224578A true JPS5224578A (en) 1977-02-24
JPS5525788B2 JPS5525788B2 (enExample) 1980-07-08

Family

ID=14267929

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10021075A Granted JPS5224578A (en) 1975-08-20 1975-08-20 Surface defect detector

Country Status (1)

Country Link
JP (1) JPS5224578A (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS545764A (en) * 1977-06-15 1979-01-17 Showa Electric Wire & Cable Co Device of detecting deformed condition of filament body
JPS55147657U (enExample) * 1979-04-09 1980-10-23
JPH0886623A (ja) * 1994-09-19 1996-04-02 Nec Corp 溝形状測定装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS545764A (en) * 1977-06-15 1979-01-17 Showa Electric Wire & Cable Co Device of detecting deformed condition of filament body
JPS55147657U (enExample) * 1979-04-09 1980-10-23
JPH0886623A (ja) * 1994-09-19 1996-04-02 Nec Corp 溝形状測定装置

Also Published As

Publication number Publication date
JPS5525788B2 (enExample) 1980-07-08

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