JPS5224514B2 - - Google Patents
Info
- Publication number
- JPS5224514B2 JPS5224514B2 JP10440272A JP10440272A JPS5224514B2 JP S5224514 B2 JPS5224514 B2 JP S5224514B2 JP 10440272 A JP10440272 A JP 10440272A JP 10440272 A JP10440272 A JP 10440272A JP S5224514 B2 JPS5224514 B2 JP S5224514B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10440272A JPS5224514B2 (en:Method) | 1972-10-20 | 1972-10-20 | |
| US408822A US3897325A (en) | 1972-10-20 | 1973-10-23 | Low temperature sputtering device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10440272A JPS5224514B2 (en:Method) | 1972-10-20 | 1972-10-20 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4962385A JPS4962385A (en:Method) | 1974-06-17 |
| JPS5224514B2 true JPS5224514B2 (en:Method) | 1977-07-01 |
Family
ID=14379711
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10440272A Expired JPS5224514B2 (en:Method) | 1972-10-20 | 1972-10-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5224514B2 (en:Method) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56141783A (en) * | 1980-03-17 | 1981-11-05 | Philips Nv | Dc-ac converter |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5117272A (ja) * | 1974-08-05 | 1976-02-12 | Toray Industries | Renzokusupatsutaringuhoho |
| JPS5931977B2 (ja) * | 1977-01-24 | 1984-08-06 | 株式会社日立製作所 | プラズマｃｖｄ装置 |
| JPH0198162U (en:Method) * | 1987-12-17 | 1989-06-30 |
-
1972
- 1972-10-20 JP JP10440272A patent/JPS5224514B2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56141783A (en) * | 1980-03-17 | 1981-11-05 | Philips Nv | Dc-ac converter |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4962385A (en:Method) | 1974-06-17 |