JPS5223530A - Treating method of chemical copper plating solution - Google Patents

Treating method of chemical copper plating solution

Info

Publication number
JPS5223530A
JPS5223530A JP9957875A JP9957875A JPS5223530A JP S5223530 A JPS5223530 A JP S5223530A JP 9957875 A JP9957875 A JP 9957875A JP 9957875 A JP9957875 A JP 9957875A JP S5223530 A JPS5223530 A JP S5223530A
Authority
JP
Japan
Prior art keywords
plating solution
copper plating
treating method
chemical copper
chemical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9957875A
Other languages
Japanese (ja)
Other versions
JPS5745300B2 (en
Inventor
Akihiko Shimizu
Noriyoshi Ootaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Inoue Japax Research Inc
Original Assignee
Inoue Japax Research Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Inoue Japax Research Inc filed Critical Inoue Japax Research Inc
Priority to JP9957875A priority Critical patent/JPS5223530A/en
Publication of JPS5223530A publication Critical patent/JPS5223530A/en
Publication of JPS5745300B2 publication Critical patent/JPS5745300B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Chemically Coating (AREA)
JP9957875A 1975-08-17 1975-08-17 Treating method of chemical copper plating solution Granted JPS5223530A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9957875A JPS5223530A (en) 1975-08-17 1975-08-17 Treating method of chemical copper plating solution

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9957875A JPS5223530A (en) 1975-08-17 1975-08-17 Treating method of chemical copper plating solution

Publications (2)

Publication Number Publication Date
JPS5223530A true JPS5223530A (en) 1977-02-22
JPS5745300B2 JPS5745300B2 (en) 1982-09-27

Family

ID=14250974

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9957875A Granted JPS5223530A (en) 1975-08-17 1975-08-17 Treating method of chemical copper plating solution

Country Status (1)

Country Link
JP (1) JPS5223530A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5811775A (en) * 1981-07-13 1983-01-22 Matsushita Electric Ind Co Ltd Treatment method of chemical plating waste liquor of copper
JPS58157959A (en) * 1982-03-13 1983-09-20 Kanto Kasei Kogyo Kk Method and apparatus for regenerating electroless plating bath
JPH02290988A (en) * 1980-05-01 1990-11-30 Imperial Chem Ind Plc <Ici> Formation of halide carrier

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02290988A (en) * 1980-05-01 1990-11-30 Imperial Chem Ind Plc <Ici> Formation of halide carrier
JPS5811775A (en) * 1981-07-13 1983-01-22 Matsushita Electric Ind Co Ltd Treatment method of chemical plating waste liquor of copper
JPS58157959A (en) * 1982-03-13 1983-09-20 Kanto Kasei Kogyo Kk Method and apparatus for regenerating electroless plating bath

Also Published As

Publication number Publication date
JPS5745300B2 (en) 1982-09-27

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