JPS522283A - Method of forming a boron silicate glass layer - Google Patents

Method of forming a boron silicate glass layer

Info

Publication number
JPS522283A
JPS522283A JP7670575A JP7670575A JPS522283A JP S522283 A JPS522283 A JP S522283A JP 7670575 A JP7670575 A JP 7670575A JP 7670575 A JP7670575 A JP 7670575A JP S522283 A JPS522283 A JP S522283A
Authority
JP
Japan
Prior art keywords
glass layer
silicate glass
forming
boron silicate
boron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7670575A
Other languages
Japanese (ja)
Inventor
Toshiko Suzuki
Naoyuki Nagashima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP7670575A priority Critical patent/JPS522283A/en
Publication of JPS522283A publication Critical patent/JPS522283A/en
Pending legal-status Critical Current

Links

Landscapes

  • Formation Of Insulating Films (AREA)
  • Inorganic Insulating Materials (AREA)

Abstract

PURPOSE: To form a boron silicate glass layer that does not develop cracking and having excellent resistance against humidity.
COPYRIGHT: (C)1977,JPO&Japio
JP7670575A 1975-06-24 1975-06-24 Method of forming a boron silicate glass layer Pending JPS522283A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7670575A JPS522283A (en) 1975-06-24 1975-06-24 Method of forming a boron silicate glass layer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7670575A JPS522283A (en) 1975-06-24 1975-06-24 Method of forming a boron silicate glass layer

Publications (1)

Publication Number Publication Date
JPS522283A true JPS522283A (en) 1977-01-08

Family

ID=13612921

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7670575A Pending JPS522283A (en) 1975-06-24 1975-06-24 Method of forming a boron silicate glass layer

Country Status (1)

Country Link
JP (1) JPS522283A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08264636A (en) * 1995-03-23 1996-10-11 Ube Ind Ltd Composite semiconductor substrate
JPH08264637A (en) * 1995-03-23 1996-10-11 Ube Ind Ltd Composite semiconductor substrate

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08264636A (en) * 1995-03-23 1996-10-11 Ube Ind Ltd Composite semiconductor substrate
JPH08264637A (en) * 1995-03-23 1996-10-11 Ube Ind Ltd Composite semiconductor substrate

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