JPS5222372A - Tubular body cleaning equipment of quartz tube for diffustion - Google Patents

Tubular body cleaning equipment of quartz tube for diffustion

Info

Publication number
JPS5222372A
JPS5222372A JP50099148A JP9914875A JPS5222372A JP S5222372 A JPS5222372 A JP S5222372A JP 50099148 A JP50099148 A JP 50099148A JP 9914875 A JP9914875 A JP 9914875A JP S5222372 A JPS5222372 A JP S5222372A
Authority
JP
Japan
Prior art keywords
quartz tube
diffustion
tubular body
cleaning equipment
body cleaning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50099148A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5311150B2 (OSRAM
Inventor
Kazumasa Ono
Hideichiro Onaga
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
DAN SANGYO KK
Nippon Telegraph and Telephone Corp
Original Assignee
DAN SANGYO KK
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by DAN SANGYO KK, Nippon Telegraph and Telephone Corp filed Critical DAN SANGYO KK
Priority to JP50099148A priority Critical patent/JPS5222372A/ja
Publication of JPS5222372A publication Critical patent/JPS5222372A/ja
Publication of JPS5311150B2 publication Critical patent/JPS5311150B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Cleaning In General (AREA)
  • Cleaning By Liquid Or Steam (AREA)
JP50099148A 1975-08-14 1975-08-14 Tubular body cleaning equipment of quartz tube for diffustion Granted JPS5222372A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50099148A JPS5222372A (en) 1975-08-14 1975-08-14 Tubular body cleaning equipment of quartz tube for diffustion

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50099148A JPS5222372A (en) 1975-08-14 1975-08-14 Tubular body cleaning equipment of quartz tube for diffustion

Publications (2)

Publication Number Publication Date
JPS5222372A true JPS5222372A (en) 1977-02-19
JPS5311150B2 JPS5311150B2 (OSRAM) 1978-04-19

Family

ID=14239595

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50099148A Granted JPS5222372A (en) 1975-08-14 1975-08-14 Tubular body cleaning equipment of quartz tube for diffustion

Country Status (1)

Country Link
JP (1) JPS5222372A (OSRAM)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5449174U (OSRAM) * 1977-09-13 1979-04-05

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5449174U (OSRAM) * 1977-09-13 1979-04-05

Also Published As

Publication number Publication date
JPS5311150B2 (OSRAM) 1978-04-19

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