JPS5222192A - Chemical polishing liquid - Google Patents
Chemical polishing liquidInfo
- Publication number
- JPS5222192A JPS5222192A JP9839475A JP9839475A JPS5222192A JP S5222192 A JPS5222192 A JP S5222192A JP 9839475 A JP9839475 A JP 9839475A JP 9839475 A JP9839475 A JP 9839475A JP S5222192 A JPS5222192 A JP S5222192A
- Authority
- JP
- Japan
- Prior art keywords
- polishing liquid
- chemical polishing
- conflict
- manage
- gives
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9839475A JPS5222192A (en) | 1975-08-13 | 1975-08-13 | Chemical polishing liquid |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9839475A JPS5222192A (en) | 1975-08-13 | 1975-08-13 | Chemical polishing liquid |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5222192A true JPS5222192A (en) | 1977-02-19 |
JPS5530073B2 JPS5530073B2 (ja) | 1980-08-08 |
Family
ID=14218611
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9839475A Granted JPS5222192A (en) | 1975-08-13 | 1975-08-13 | Chemical polishing liquid |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5222192A (ja) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6356120U (ja) * | 1986-09-26 | 1988-04-14 | ||
JPS63101160A (ja) * | 1986-10-17 | 1988-05-06 | 株式会社ダイフク | 搬送装置 |
US5885476A (en) * | 1996-03-05 | 1999-03-23 | Mec Co., Ltd. | Composition for microetching copper or copper alloy |
JP2006052425A (ja) * | 2004-08-10 | 2006-02-23 | C Uyemura & Co Ltd | ソフトエッチング液及びめっき方法 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4984925A (ja) * | 1972-12-12 | 1974-08-15 |
-
1975
- 1975-08-13 JP JP9839475A patent/JPS5222192A/ja active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4984925A (ja) * | 1972-12-12 | 1974-08-15 |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6356120U (ja) * | 1986-09-26 | 1988-04-14 | ||
JPS63101160A (ja) * | 1986-10-17 | 1988-05-06 | 株式会社ダイフク | 搬送装置 |
JPH0435384B2 (ja) * | 1986-10-17 | 1992-06-10 | Daifuku Kk | |
US5885476A (en) * | 1996-03-05 | 1999-03-23 | Mec Co., Ltd. | Composition for microetching copper or copper alloy |
JP2006052425A (ja) * | 2004-08-10 | 2006-02-23 | C Uyemura & Co Ltd | ソフトエッチング液及びめっき方法 |
JP4645801B2 (ja) * | 2004-08-10 | 2011-03-09 | 上村工業株式会社 | めっき方法 |
Also Published As
Publication number | Publication date |
---|---|
JPS5530073B2 (ja) | 1980-08-08 |
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