JPS5221784A - Production system for semiconductor unit - Google Patents

Production system for semiconductor unit

Info

Publication number
JPS5221784A
JPS5221784A JP50097486A JP9748675A JPS5221784A JP S5221784 A JPS5221784 A JP S5221784A JP 50097486 A JP50097486 A JP 50097486A JP 9748675 A JP9748675 A JP 9748675A JP S5221784 A JPS5221784 A JP S5221784A
Authority
JP
Japan
Prior art keywords
production system
semiconductor unit
dcrack
levelling
causing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50097486A
Other languages
Japanese (ja)
Other versions
JPS5922378B2 (en
Inventor
Noboru Okuyama
Teruo Yoneyama
Yasuo Iizuka
Hiroshi Nakasone
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP50097486A priority Critical patent/JPS5922378B2/en
Priority to GB32879/76A priority patent/GB1504484A/en
Priority to DE2636383A priority patent/DE2636383C2/en
Publication of JPS5221784A publication Critical patent/JPS5221784A/en
Publication of JPS5922378B2 publication Critical patent/JPS5922378B2/en
Expired legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C15/00Surface treatment of glass, not in the form of fibres or filaments, by etching

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)

Abstract

PURPOSE:To prevent stage cutting and dcrack causing by using glass layer including the fixed content of P2O5 and B2O3 and levelling and smoothing opening corner through heat treatment.
JP50097486A 1975-08-13 1975-08-13 Manufacturing method of semiconductor device Expired JPS5922378B2 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP50097486A JPS5922378B2 (en) 1975-08-13 1975-08-13 Manufacturing method of semiconductor device
GB32879/76A GB1504484A (en) 1975-08-13 1976-08-06 Semiconductor device and a method for manufacturing the same
DE2636383A DE2636383C2 (en) 1975-08-13 1976-08-12 Method for manufacturing a MOS field effect transistor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50097486A JPS5922378B2 (en) 1975-08-13 1975-08-13 Manufacturing method of semiconductor device

Publications (2)

Publication Number Publication Date
JPS5221784A true JPS5221784A (en) 1977-02-18
JPS5922378B2 JPS5922378B2 (en) 1984-05-26

Family

ID=14193592

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50097486A Expired JPS5922378B2 (en) 1975-08-13 1975-08-13 Manufacturing method of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5922378B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57186343A (en) * 1981-04-28 1982-11-16 Rca Corp Method of rounding opening edge of glass film
JPS6068151A (en) * 1984-07-09 1985-04-18 Ube Ind Ltd Insert conveyance method for injection molding equipment

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01131076U (en) * 1988-03-01 1989-09-06

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57186343A (en) * 1981-04-28 1982-11-16 Rca Corp Method of rounding opening edge of glass film
JPS6068151A (en) * 1984-07-09 1985-04-18 Ube Ind Ltd Insert conveyance method for injection molding equipment

Also Published As

Publication number Publication date
JPS5922378B2 (en) 1984-05-26

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